Self-aligned contacts for field effect transistor devices
View Patent ↗A method for forming a field effect transistor includes forming a gate stack, a spacer adjacent to opposing sides of the gate stack, a silicide source region and a silicide drain region on opposing sides of the spacer, epitaxially growing silicon on the source region and the drain region; forming a liner layer on the gate stack and the spacer, removing a portion of the liner layer to expose a portion of the hardmask layer, removing the exposed portions of the hardmask layer to expose a silicon layer of the gate stack, removing exposed silicon to expose a portion of a metal layer of the gate stack, the source region, and the drain region; and depositing a conductive material on the metal layer of the gate stack, the silicide source region, and the silicide drain region.
1. A method for forming a field effect transistor, the method comprising:
forming a gate stack on a substrate;
forming a spacer on the substrate adjacent to opposing sides of the gate stack;
forming a silicide source region on the substrate adjacent to the spacer on a first side of the gate stack;
forming a silicide drain region on the substrate adjacent to the spacer on a second side of the gate stack;
epitaxially growing silicon on the exposed silicide source region and the exposed silicide drain region;
forming a liner layer on a hardmask layer of the gate stack and the spacer;
removing a portion of the liner layer to expose a portion of the hardmask layer;
removing the exposed portions of the hardmask layer to expose a silicon layer of the gate stack;
removing exposed silicon to expose a portion of a metal layer of the gate stack, the silicide source region, and the silicide drain region; and
depositing a conductive material on the exposed metal layer of the gate stack, the exposed silicide source region, and the exposed silicide drain region.
2. The method of claim 1 , wherein the silicide source region and the silicide drain region are aligned on a first axis, the first axis aligned orthogonally to the gate stack.
3. The method of claim 2 , wherein the exposed a portion of the hardmask layer of the gate stack is aligned on a second axis, the second axis aligned in parallel to the first axis.
4. The method of claim 1 , wherein the gate stack includes a dielectric layer disposed on the substrate, the metal layer disposed on the dielectric layer, the silicon layer disposed on the dielectric layer, and the hardmask layer disposed on the silicon layer.
5. The method of claim 1 , wherein the spacer includes a nitride material.
6. The method of claim 1 , wherein the spacer includes a first nitride layer and a second nitride layer.
7. The method of claim 1 , wherein the removal of the portion of the liner layer to expose a portion of the hardmask layer forms a cavity defined by the liner layer and the exposed portion of the hardmask layer.
8. The method of claim 1 , wherein the removal of the exposed silicon forms a cavity defined by the liner layer and the silicide drain region.
9. The method of claim 1 , wherein the substrate includes a silicon region and a silicon-on-insulator trench region (SOI).
10. The method of claim 1 , wherein the liner layer is formed on the epitaxially grown silicon, and the method further includes removing a portion of the liner layer and the epitaxially grown silicon prior to removing a portion of the liner layer to expose a portion of the hardmask layer.
11. The method of claim 10 , wherein the portion of the liner layer and the epitaxially grown silicon are removed with a chemical mechanical polishing process.
12. The method of claim 1 , wherein the exposed silicon is removed with a reactive ion etching process.
13. The method of claim 1 , wherein the exposed portions of the hardmask layer are removed with a reactive ion etching process.