Semiconductor device and manufacturing method of the same
One aspect of the present invention is a semiconductor device including: a semiconductor substrate; a first wiring that is formed on the semiconductor substrate; a second wiring that is formed to cross over the first wiring with a space interposed therebetween at a cross portion in which the first wiring and the second wiring cross each other; a protective film that is formed on the semiconductor substrate to cover at least a part of the first wiring, the part being located under the second wiring in the cross portion; and an insulator film that is formed in an island shape on the protective film under the second wiring in the cross portion to be located between edges of the protective film and to cover the first wiring in the cross portion.
1. A semiconductor device comprising:
a semiconductor substrate;
a first wiring on the semiconductor substrate;
a second wiring that crosses the first wiring at a cross portion;
a protective film on the semiconductor substrate covering at least a part of the first wiring under the second wiring in the cross portion;
an insulator film in an island shape on the protective film under the second wiring in the cross portion between edges of the protective film and covering the first wiring in the cross portion; and
a gas-filled space between said insulator film and said second wiring in the cross portion,
wherein the second wiring crosses an edge of the insulator film and contacts an upper surface of the protective film.
2. The semiconductor device according to claim 1 , wherein the insulator film is formed of a material formed by a spin-coating process or a printing process.
3. The semiconductor device according to claim 1 , wherein the insulator film is formed on an upper surface and a side surface of the first wiring with a uniform thickness.
4. The semiconductor device according to claim 1 , wherein an edge of the insulator film is located outside of an edge of the first wiring.
5. The semiconductor device according to claim 1 , wherein the insulator film is thicker than the protective film.
6. The semiconductor device according to claim 1 , wherein the insulator film has a thickness equal to or more than 0.5 um.
7. The semiconductor device according to claim 1 , wherein the protective film has a thickness equal to or less than 0.2 um.
8. The semiconductor device according to claim 1 , wherein a distance between the first wiring and the second wiring in the cross portion is equal to or more than 1.0 um.
9. The semiconductor device according to claim 1 , wherein one of the first wiring and the second wiring is a gate electrode and the other is a source electrode.
10. The semiconductor device according to claim 1 , wherein one of the first wiring and the second wiring is a drain electrode and other is a source electrode.
11. The semiconductor device according to claim 1 , wherein the insulator film has a relative permittivity of 3.5 or less.
12. The semiconductor device according to claim 1 , wherein the protective film is outside of the cross portion.
13. A manufacturing method of a semiconductor device comprising:
forming a first wiring on a semiconductor substrate;
forming a second wiring to cross the first wiring with a gas-filled space interposed therebetween at a cross portion in which the first wiring and the second wiring cross each other;
forming a protective film on the semiconductor substrate to cover at least a part of the first wiring, the part being located under the second wiring in the cross portion; and
forming an insulator film in an island shape on the protective film under the second wiring in the cross portion between edges of the protective film, the insulator film covering the first wiring in the cross portion and leaving a portion of said gas-filled space between said insulator film and said second wiring,
wherein the second wiring crosses an edge of the insulator film and contacts an upper surface of the protective film.
14. The manufacturing method of the semiconductor device according to claim 13 , wherein the forming the insulator film is performed by a spin-coating process or a printing process.
15. The manufacturing method of the semiconductor device according to claim 13 , wherein the forming the insulator film is performed by exposing and developing an insulator material having photosensitivity.
16. The manufacturing method of the semiconductor device according to claim 13 , wherein an edge of the insulator film is located outside an edge of the first wiring.
17. The manufacturing method of the semiconductor device according to claim 13 , wherein the insulator film is thicker than the protective film.
18. The manufacturing method of the semiconductor device according to claim 13 , wherein the insulator film has a thickness equal to or more than 0.5 um.
19. The manufacturing method of the semiconductor device according to claim 13 , wherein the protective film has a thickness equal to or less than 0.2 um.
20. The manufacturing method of the semiconductor device according to claim 13 , wherein a distance between the first wiring and the second wiring in the cross portion is more equal to or more than 1.0 um.
21. The manufacturing method of the semiconductor device according to claim 13 , wherein one of the first wiring and the second wiring is a gate electrode and the other is a source electrode.
22. The manufacturing method of the semiconductor device according to claim 13 , wherein one of the first wiring and the second wiring is a drain electrode and the other is a source electrode.
23. The manufacturing method of the semiconductor device according to claim 13 , wherein the insulator film has a relative permittivity of 3.5 or less.