Semiconductor device

1. A semiconductor device, comprising:

a substrate;

a semiconductor element, formed over a principal surface of said substrate and including an interconnect layer; and

a magnetic shield covering said semiconductor element,

wherein said magnetic shield includes a first structural member and a second structural member covering said first structural member, and

wherein each of said first and said second structural members includes:

a magnetic shielding film composed of a magnetic substance and covering said semiconductor element; and

a buffer film disposed between said semiconductor element and said magnetic shielding film and preventing a diffusion of said magnetic substance,

wherein said buffer film contains one, two or more chemical element(s) selected from a group consisting of tungsten (W), titanium (Ti) and ruthenium (Ru),

wherein said magnetic shielding film is composed of said magnetic substance having spinel crystal structure and has (311) face oriented along a film-thickness direction,

wherein said first structural member is composed of said buffer film and said magnetic shielding film,

wherein said second structural member covers over said first structural member,

wherein said magnetic substance in said second structural member has a (311) face oriented along a film-thickness direction, and

wherein in both said first structural member and said second structural member, a degree of crystallinity of a surface facing said buffer film of said magnetic shield is greater than a degree of crystallinity of other parts of said magnetic shield.

2. The semiconductor device as set forth in claim 1 , further comprising an upper buffer film covering said magnetic shield.

3. The semiconductor device as set forth in claim 1 , wherein said magnetic substance is ferrite.

4. The semiconductor device as set forth in claim 3 , wherein said ferrite contains at least one of oxide magnetic materials of XFe 2 O 4 and Y 1-n Z n Fe 2 O 4 as a main constituent,

where X is one selected from a group consisting of nickel (Ni), zinc (Zn), copper (Cu), cobalt (Co), manganese (Mn) and iron (Fe),

Y is one selected from a group consisting of Ni, Zn, Cu, Co and Mn,

Z is not the same as Y, and is one selected from a group consisting of Ni, Zn, Cu, Co and Mn, and

n satisfies 0<n<1.

5. The semiconductor device as set forth in claim 1 , wherein said buffer film includes a film of nitride(s) of one, two or more chemical element(s) selected from the group consisting of W, Ti and Ru, or a film of oxide(s) of said one, two or more chemical element(s).

6. The semiconductor device as set forth in claim 1 , wherein said buffer film contains tantalum nitride (TaN) as a main constituent, and wherein said magnetic shielding film is composed of said magnetic substance having the spinel crystal structure and has the (311) face oriented along a film-thickness direction.

7. The semiconductor device as set forth in claim 1 , wherein an insulating film is provided between said semiconductor element and said buffer film of said first structural member.

8. The semiconductor device as set forth in claim 7 , wherein said magnetic shield is provided to selectively cover an upper surface of said semiconductor element.

9. The semiconductor device as set forth in claim 7 , wherein a concave section or a convex section is provided in said insulating film, and wherein said magnetic shield is provided along a face of said concave section or said convex section of said insulating film.

10. The semiconductor device as set forth in claim 7 , wherein a section of said interconnect layer constitutes an inductor, and said magnetic shield is provided to cover at least a region for forming said inductor.

11. The semiconductor device as set forth in claim 10 , wherein an interconnect composing said inductor is formed to have a spiral feature, and wherein a concave section is provided in said insulating film in a central region of said inductor.

12. The semiconductor device as set forth in claim 7 , wherein said semiconductor element includes a memory cell having a magnetoresistive element formed in said interconnect layer, and wherein said magnetic shield is provided to cover a region for forming said memory cell.