Forming electrodes for chalcogenide containing devices
View Patent ↗The electrode of a phase change memory may be formed with a mixture of metal and a non-metal, the electrode having less nitrogen atoms than metal atoms. Thus, in some embodiments, at least a portion of the electrode has less nitrogen than would be the case in a metal nitride. The mixture can include metal and nitrogen or metal and silicon, as two examples. Such material may have good adherence to chalcogenide with lower reactivity than may be the case with metal nitrides.
1. An apparatus comprising:
a first electrode and a second electrode;
a chalcogenide layer between the first and second electrodes; and
a first electrode layer thinner than the first electrode and disposed between the first electrode and the chalcogenide layer and a second electrode layer thinner than the second electrode and disposed between the second electrode and the chalcogenide layer, each of the first and second electrode layers including a mixture of a metal and nitrogen, wherein an atomic percentage of the nitrogen of the mixture of metal and nitrogen includes 30 to 40 atomic percent, wherein an atomic percent of the metal of the mixture of metal and nitrogen is 100 minus the atomic percentage of the nitrogen.
2. The apparatus of claim 1 wherein said chalcogenide layer is part of a memory element.
3. The apparatus of claim 1 wherein said chalcogenide layer is part of an ovonic threshold switch.
4. A method comprising:
forming a chalcogenide containing device which includes: a first and second electrodes, a chalcogenide layer between the first and second electrodes, and first and second electrode layers, respective ones of the first and second electrode layers disposed between the chalcogenide layer and respective ones of the first and second electrodes, wherein the first and second electrode layers each include a mixture of metal and nitrogen, wherein an atomic percentage of the metal of the mixture of metal and nitrogen is 100 minus an atomic percentage of the nitrogen of the mixture of metal and nitrogen.
5. The method of claim 4 , wherein forming includes forming the first and second electrodes and the first and second electrode layers by sputtering.
6. The method of claim 5 , wherein the first electrode and first electrode layer and/or the second electrode and second electrode layer are formed successively in the same deposition chamber without venting between layers.
7. The method of claim 4 including forming a phase change memory.
8. The method of claim 4 including forming an ovonic threshold switch.
9. The apparatus of claim 1 wherein the at least one of the first and second electrodes includes a second metal which is the same as the metal in the mixture of a respective one of the first or second electrode layer.
10. The apparatus of claim 1 wherein each of the first and second electrode layers have a resistivity of less than 200 μOhm centimeters.
11. The method of claim 4 wherein each of the first and second electrode layers have a resistivity of less than 200 μOhm centimeters.