Surface treatment composition, surface treatment method, and method for manufacturing semiconductor device
View Patent ↗A surface treatment composition of this invention is a composition for treating a metal wiring-including surface of a semiconductor substrate, which includes a compound (A) represented by a specific structural formula and a solvent (B) having a boiling point at one atmospheric pressure of 50 to 300° C., and has a pH of 4 to 11. According to the surface treatment composition of the present invention, oxidation of metal wiring of a semiconductor substrate can be suppressed and deterioration of the flatness of the metal wiring portion due to unusual oxidation can be suppressed. Furthermore, when an insulating film or a barrier metal film is present on a metal wiring-including surface of the semiconductor substrate, fang and surface roughness of the metal wiring occurring in the interface between the metal wiring and the insulating film or the barrier metal film can be suppressed.
1. A surface treatment method, comprising:
bringing a surface treatment composition into contact with a metal wiring-including surface of a semiconductor substrate, which has been chemically-mechanically polished, to treat the metal wiring-including surface of the semiconductor substrate, the surface treatment composition comprising a compound (A) represented by the following Formula (1) and a solvent (B) having a boiling point at one atmospheric pressure of 50 to 300° C., and has a pH of 4 to 11,
wherein Rs each independently represent an alkyl group, an aryl group, an alkoxy group, an amino group, an amino alkyl group, a hydroxy group, a hydroxyalkyl group, a carboxy group, a carboxyalkyl group, a carbamoyl group, or an aldehyde group and m is an integer of 0 to 4.
2. The surface treatment method according to claim 1 , wherein the surface treatment composition further comprises organic resin particles.
3. The surface treatment method according to claim 1 , wherein the solvent (B) is water.
4. The surface treatment method according to claim 2 , wherein the solvent (B) is water.
5. A method for manufacturing a semiconductor device, comprising:
treating a metal wiring-including surface of a semiconductor substrate, which has been chemically-mechanically polished, by the surface treatment method according to claim 1 .
6. The method for manufacturing a semiconductor device according to claim 5 , wherein the surface treatment composition further comprises organic resin particles.
7. The method for manufacturing a semiconductor device according to claim 5 , wherein the solvent (B) is water.
8. The method for manufacturing a semiconductor device according to claim 6 , wherein the solvent (B) is water.
9. The method for manufacturing a semiconductor device according to claim 5 , further comprising:
chemically-mechanically polishing the semiconductor substrate before treating the metal wiring-including surface of the semiconductor substrate.
10. The method according to claim 1 , wherein the surface treatment composition has a water-soluble component and a water-insoluble component, wherein the water-soluble component comprises compound (A) and the water-insoluble component consists of organic resin particles.
11. The method according to claim 10 , wherein the water-soluble component further comprises water, a surface active agent, and a pH adjuster.
12. The surface treatment method according to claim 1 , wherein the surface treatment composition is contacted with the metal wiring-including surface of the semiconductor substrate without chemical mechanical polishing of the metal wiring-including surface of the semiconductor substrate during the contacting.
13. The surface treatment method according to claim 1 , wherein the surface treatment composition further comprises resin particles which physically adsorb impurity metal ions from the metal wiring-including surface of the semiconductor substrate during the contacting.