Method of manufacturing semiconductor device
A method of manufacturing a semiconductor device includes performing heat treatment for activating impurities of a transistor having a gate electrode over a gate insulating film with a higher relative permittivity than a silicon oxynitride film or a silicon oxide film. In the heat treatment, a first heat treatment, in which a wafer surface is heated at a temperature of 800 to 1000° C. in 5 to 50 milliseconds by low-output flash lamp annealing or laser annealing, and a second heat treatment, in which the wafer surface is heated at a temperature equal to or more than of 1100° C. in 0.1 to 10 milliseconds by flash lamp annealing or laser annealing with a higher output than in the first heat treatment, are performed in this order.
1. A method of manufacturing a semiconductor device, the method comprising:
performing heat treatment for activating impurities of a transistor having a gate electrode over a gate insulating film with a higher relative permittivity than a silicon oxynitride film or a silicon oxide film,
wherein said performing heat treatment comprises:
performing a first heat treatment, in which a wafer surface is heated at a temperature of 800 to 1000° C. in 5 to 50 milliseconds by one of low-output flash lamp annealing or laser annealing; and
performing a second heat treatment, in which said wafer surface is heated at a temperature equal to or more than 1100° C. in 0.1 to 10 milliseconds one of by flash lamp annealing or laser annealing with a higher output than in said first heat treatment,
wherein said second heat treatment is performed after said first heat treatment.
2. The method according to claim 1 , wherein said performing said heat treatment is performed after an implantation of a source/drain extension,
wherein a sidewall and a source/drain region are formed before said performing heat treatment, and
wherein a third heat treatment is performed after said sidewall and said source/drain region are formed, said third heat treatment being performed by flash lamp annealing or laser annealing in which said wafer surface temperature is held at equal to or more than 1000° C. for 0.1 to 10 milliseconds.
3. The method according to claim 1 , wherein a fourth heat treatment is performed after an implantation of a source/drain extension, said fourth heat treatment being performed by flash lamp annealing or laser annealing in which said wafer surface temperature is held at equal to or more than 1000° C. for 0.1 to 10 milliseconds,
wherein a sidewall and a source/drain region are formed after said fourth heat treatment, and
wherein said performing said heat treatment is performed after said sidewall and said source/drain region are formed.
4. The method according to claim 1 , wherein a material of said gate electrode comprises at least one conductive material selected from the group consisting of Poly-Si, Ta, TaSix, TaCx, Ti, TiSix, TiCx, Hf, HfSix, HfCx, Mo, MoSix, MoCx, TaNx, W, WSix, WCx, Zr, ZrSix, ZrCx, and nitrides thereof.
5. The method according to claim 1 , wherein a material of said gate insulating film comprises at least one dielectric material selected from the group consisting of SiO2, HfO2, HfSiOx, HfAlOx, ZrO2, ZrSiOx, ZrAlOx, Y2O3, La2O3, MgO2, Al2O3, and nitrides thereof.
6. The method according to claim 1 , wherein said gate electrode comprises one of a polysilicon gate electrode and a metal gate electrode.
7. The method according to claim 1 , wherein a sidewall and a source/drain region are formed after an implantation of a source/drain extension, and
wherein said performing said heat treatment is performed after said sidewall and said source/drain region are formed.