Method for polishing through-silicon via (TSV) wafers and a polishing composition used in the method
A method for polishing Through-Silicon Via (TSV) wafers is provided. The method comprises a step of subjecting the surface of a TSV wafer to a polishing treatment with a polishing composition containing an organic alkaline compound, an oxidizing agent selected from sodium chlorite and/or potassium bromate, silicon oxide abrasive particles, and a solvent to simultaneously remove Si and conductive materials at their respective removal rates. By using the method of this invention, Si and conductive materials can be simultaneously polished at higher removal rates to significantly save the necessary working-hour costs for polishing TSV wafers. A polishing composition used in the above method is also provided.
1. A method for polishing a through-silicon via (TSV) wafer, comprising a step of subjecting a surface of the TSV wafer to a polishing treatment with a polishing composition comprising:
an organic alkaline compound;
an oxidizing agent selected from a chlorite salt and/or a bromated salt, wherein the oxidizing agent is not hydrogen peroxide;
silicon oxide abrasive particles and a solvent, so as to simultaneously remove Si and a conductive material on the TSV wafer, wherein both the conductive material and the Si are removed at rates of about 6,000 Å/min or higher, and wherein the silicon oxide abrasive particles are present in the polishing composition from about 1.25 wt % to about 10 wt %.
2. The method for polishing a TSV wafer of claim 1 , wherein the organic alkaline compound is selected from a group consisting of diamines, triamines, tetramines and combinations thereof.
3. The method for polishing a TSV wafer of claim 1 , wherein the organic alkaline compound is selected from a group consisting of ethylenediamine, N-(−2-hydroxyethyl)ethylenediamine, 1,2-diaminopropane, diethylenetriamine, triethyleneteramine and combinations thereof.
4. The method for polishing a TSV wafer of claim 1 , wherein the organic alkaline compound is ethylenediamine.
5. The method for polishing a TSV wafer of claim 1 , wherein the solvent is water.
6. The method for polishing a TSV wafer of claim 1 , wherein the polishing composition further comprises an amino acid.
7. The method for polishing a TSV wafer of claim 6 , wherein the amino acid is selected from a group consisting of alanine, β-alanine, aspartic acid, arginine, glutamic acid, ethylenediaminetetraacetic acid, diethylenetriaminepentaacetic acid, propylenediaminetetraacetic acid, glycine and combination thereof.
8. The method for polishing a TSV wafer of claim 6 , wherein the amino acid is glycine.
9. The method for polishing a TSV wafer of claim 1 , wherein the organic alkaline compound is present in the polishing composition from about 0.01 wt % to about 10 wt %.
10. The method for polishing a TSV wafer of claim 9 , wherein the organic alkaline compound is present in the polishing composition from about 0.1 wt % to about 5 wt %.
11. The method for polishing a TSV wafer of claim 1 , wherein the oxidizing agent is present in the polishing composition from about 0.01 wt % to about 10 wt %.
12. The method for polishing a TSV wafer of claim 11 , wherein the oxidizing agent is present in the polishing composition from about 0.1 wt % to about 5 wt %.
13. The method for polishing a TSV wafer of claim 6 , wherein the amino acid is present in the polishing composition from about 0.01 wt % to about 5 wt %.
14. The method for polishing a TSV wafer of claim 1 , wherein the conductive material is made of copper.