Semiconductor processing method
View Patent ↗A process for treating the surface of a substrate in the manufacture of a semiconductor device. The process comprises providing a concentrated acid or base, a peroxide and water, and delivering the acid or base, the peroxide and the water to the surface of the substrate. The acid or base and the water are delivered separately to the surface of the substrate and allowed to mix on the surface, and the water is delivered in pulses. The present invention also provides an apparatus adapted to carry out this process.
1. A process for removing resist from the surface of a substrate in the manufacture of a semiconductor device, the process comprising:
providing a mixture of a peroxide and one of concentrated acid or concentrated base, and separately providing water;
delivering the water and the mixture of peroxide and one of acid or base separately and concurrently to a substrate having resist on its surface; and
allowing the water and the mixture of peroxide and one of acid or base to mix on the surface to remove resist;
wherein the mixture of peroxide and one of acid or base is delivered to the surface of the substrate continuously and the water is delivered in pulses while the mixture is delivered.
2. The process as claimed in claim 1 , wherein the mixture is a mixture of the peroxide and acid, and wherein the acid is sulphuric acid.
3. The process as claimed in claim 2 , wherein the peroxide is hydrogen peroxide.
4. The process as claimed in claim 2 , wherein the peroxide is provided as an aqueous solution having a concentration of 10 to 70 wt %.
5. The process as claimed in claim 2 , wherein the temperature of at least part of the mixture at the surface reaches 135 degrees ° C. or more during the delivery of the water to the surface.
6. The process as claimed in claim 1 , wherein the mixture is a mixture of the peroxide and base, and wherein the base is ammonium hydroxide.
7. The process as claimed in claim 6 , wherein the peroxide is hydrogen peroxide.
8. The process as claimed in claim 6 , wherein the temperature of at least part of the mixture at the surface reaches 135 degrees ° C. or more during the delivery of the water to the surface.
9. The process as claimed in claim 1 , wherein the peroxide is hydrogen peroxide.
10. The process as claimed in claim 1 , wherein the peroxide is provided as an aqueous solution having a concentration of 10 to 70 wt %.
11. The process as claimed in claim 1 , wherein the acid and peroxide are delivered to the surface in a weight ratio of 1:0.01 to 1:0.5 acid:peroxide.
12. The process as claimed in claim 1 , wherein the substrate is being rotated.
13. The process as claimed in claim 1 , wherein the temperature of at least part of the mixture at the surface reaches 135 degrees ° C. or more during the delivery of the water to the surface.
14. The process as claimed in claim 1 , wherein a layer of resist is present on the surface of the substrate and the process further comprises ion implantation of the resist-covered surface prior to the delivery of the acid or base, peroxide, and water.
15. The process as claimed in claim 1 , wherein the water is delivered in pulses of 1 to 5 seconds with a 1 to 5 second interval between pulses.
16. The process as claimed in claim 1 , wherein the ratio of time of a pulse of water (t 1 ) and the interval (t 2 ) until the a next pulse of water is 1:1 to 1:5 t 1 :t 2 .
17. The process as claimed in claim 1 , wherein the substrate comprises at least one of the group consisting of silicon, germanium, and gallium arsenide.
18. The process as claimed in claim 1 , wherein the mixture is a mixture of the peroxide and acid, and wherein the acid is phosphoric acid.
19. The process as claimed in claim 1 , wherein the base and peroxide are delivered to the surface in a weight ratio of 1:0.01 to 1:0.5 base:peroxide.
20. A semiconductor processing system comprising:
a substrate holder to hold a substrate;
a first delivery system connected to a water source to deliver water;
a second delivery system connected to a source of peroxide and a source of concentrated acid or base; and
a controller arranged to control the first and second delivery systems, the controller comprising instructions for, when executed by the controller, delivering the water and a mixture of peroxide and acid or base separately and concurrently to the surface of the substrate and allow them to mix on the surface, and instructions for delivering the mixture of peroxide and acid or base continuously and the water in pulses while the mixture is delivered.