Coating compositions suitable for use with an overcoated photoresist
View Patent ↗In one aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise a diene/dienophile reaction product. In another aspect, organic coating compositions, particularly antireflective coating compositions, are provided that comprise a component comprising a hydroxyl-naphthoic group, such as a 6-hydroxy-2-naphthoic group Preferred compositions of the invention are useful to reduce reflection of exposing radiation from a substrate back into an overcoated photoresist layer and/or function as a planarizing, conformal or via-fill layer.
1. A method for forming a photoresist relief image comprising:
(a) applying over a substrate a coating layer of a composition comprising a component that comprises 1) a hydroxyl-naphthoic group and 2) a reaction product of an imide-containing dienophile and a polycyclic aromatic group;
(b) applying a photoresist layer above the coating composition layer; and
(c) exposing the applied photoresist layer to patterned radiation and then developing the exposed photoresist layer with an aqueous alkaline developer composition,
wherein the developer selectively removes both the photoresist layer and the underlying coating composition layer the image as defined in the photoresist layer by patterned activating radiation.
2. A method of claim 1 wherein the coating composition comprises a resin comprising a 6-hydroxy-2-naphthoic group.
3. The method of claim 1 wherein the coating composition layer comprises a resin that comprises a reaction product of (1) a dienophile and (2) an anthracene or pentacene group.
4. The method of claim 1 wherein the photoresist layer is applied without prior crosslinking of the coating composition layer.