Pattern inspection apparatus and pattern inspection method
View Patent ↗A pattern inspection apparatus includes: an optical image acquiring unit configured to acquire optical image data of a target object on which each of a plurality of identical patterns is respectively formed at a respective corresponding position of a plurality of forming positions with distortion; a cut-out unit configured to cut out a plurality of partial optical image data from the optical image data; a correction unit configured to correct positions of the plurality of partial optical image data by using distortion information from which each amount of distortion of the plurality of identical patterns respectively formed at the respective corresponding position of the plurality of forming positions on the target object can be acquired; and a comparison unit configured to compare a plurality of corrected partial optical image data against each other on a pixel to pixel basis.
1. A pattern inspection apparatus comprising:
an optical image acquiring unit, with a computer or an electric circuit, configured to acquire optical image data of a target object on which each of a plurality of identical patterns is respectively formed at a respective corresponding position of a plurality of forming positions with distortion;
a cut-out unit, with the computer or an electric circuit, configured to cut out a plurality of partial optical image data from the optical image data;
a correction unit, with the computer or an electric circuit, configured to correct positions of the plurality of partial optical image data by using distortion information from which each amount of distortion of the plurality of identical patterns respectively formed at the respective corresponding position of the plurality of forming positions on the target object can be acquired; and
a comparison unit, with the computer or an electric circuit, configured to compare a plurality of corrected partial optical image data against each other on a pixel to pixel basis,
wherein each of a plurality of partial design image data corresponding to the plurality of partial optical image data is respectively formed with distortion,
the correction unit performs alignment of the plurality of partial design image data to calculate a first amount of misalignment, aligns one of the plurality of partial optical image data and one of the plurality of partial design image data corresponding to the one of the plurality of partial optical image data to calculate a second amount of misalignment, aligns another one of the plurality of partial optical image data and another one of the plurality of partial design image data corresponding to the another one of the plurality of partial optical image data to calculate a third amount of misalignment, and corrects positions of the plurality of partial optical image data by using the first, second, and third amount of misalignment as the distortion information.
2. The apparatus according to claim 1 , wherein a plurality of partial design image data corresponding to the plurality of partial optical image data, the plurality of partial design image data being generated based on design pattern data corresponding to the plurality of identical patterns formed at the plurality of forming positions on the target object with distortion, is used as the distortion information.
3. The apparatus according to claim 2 , further comprising an output unit, with the computer or an electric circuit, configured to output error information when an amount of misalignment between each of the plurality of partial optical image data and a respective corresponding partial design image data exceeds a predetermined threshold.
4. The apparatus according to claim 1 , wherein exposure apparatus information indicating amounts of misalignment of patterns generated when the patterns are transferred by an exposure apparatus using the target object as an exposure masks, is used as the distortion information.
5. The apparatus according to claim 1 , wherein the correction unit performs a parallel moving process in at least one of x and y directions orthogonal to each other to correct the positions of the plurality of partial optical image data.
6. The apparatus according to claim 1 , wherein the correction unit corrects the positions of the plurality of partial optical image data by performing an image rotating process.
7. The apparatus according to claim 6 , wherein the correction unit performs the image rotating process in a direction in which arrangement angles of the plurality of partial optical image data come close to arrangement angles of a plurality of partial optical image data obtained by cut out when each of a plurality of identical patterns is respectively formed at the corresponding position of the plurality of forming positions with no distortion.
8. A pattern inspection method comprising:
acquiring optical image data of a target object on which each of a plurality of identical patterns is formed at a respective corresponding position of a plurality of forming positions with distortion;
cutting out a plurality of partial optical image data from the optical image data;
correcting positions of the plurality of partial optical image data by using distortion information from which each amount of distortion of the plurality of identical patterns respectively formed at the respective corresponding position of the plurality of forming positions on the target object can be acquired; and
comparing a plurality of corrected partial optical image data against each other on a pixel to pixel basis, to output a result of the comparing,
wherein each of a plurality of partial design image data corresponding to the plurality of partial optical image data is respectively formed with distortion,
alignment of the plurality of partial design image data is performed to calculate a first amount of misalignment, one of the plurality of partial optical image data and one of the plurality of partial design image data corresponding to the one of the plurality of partial optical image data are aligned to calculate a second amount of misalignment, another one of the plurality of partial optical image data and another one of the plurality of partial design image data corresponding to the another one of the plurality of partial optical image data are aligned to calculate a third amount of misalignment, and positions of theplurality of partial optical image data are corrected by using the first, second, and third amount of misalignment as the distortion information.
9. The method according to claim 8 , wherein a plurality of partial design image data corresponding to the plurality of partial optical image data, the plurality of partial design image data being generated based on design pattern data corresponding to the plurality of identical patterns formed at the plurality of forming positions on the target object with distortion, is used as the distortion information.
10. The method according to claim 8 , wherein exposure apparatus information indicating amounts of misalignment of patterns generated when the patterns are transferred by an exposure apparatus using the target object as an exposure masks, is used as distortion information.