METHOD AND DEVICE FOR TESTING SEMICONDUCTOR
A semiconductor testing device of the prevent invention includes a current detecting circuit, an electric current drawing circuit, and a determining device. The electric current drawing circuit is connected to a semiconductor device under test, and draws a branched electric current branched from a measured electric current output from a second terminal based on predetermined electric voltage. The current detecting circuit is connected to the semiconductor device, and detects a detection current obtained by subtracting the branched electric current from the measured electric current. The determining device determines a quality of the semiconductor device based on the detection current.
1 . A semiconductor testing device for testing by applying predetermined electric voltage between a first terminal and a second terminal of a semiconductor device under test, comprising:
an electric current drawing circuit that connects to the second terminal, the electric current drawing circuit drawing a branched electric current branched from measured electric current output from the second terminal based on the predetermined electric voltage;
a current detecting circuit that connects to the second terminal, the current detecting circuit detecting a detection current obtained by subtracting the branched electric current from the measured electric current; and
a determining device that determines a quality of the semiconductor device based on the detection current.
2 . The semiconductor testing device according to claim 1 , wherein
the current detecting circuit converts the detection current to electric voltage, and
the determining device determines the quality of the semiconductor device based on a sum of the detection current depending on the electric voltage converted by the current detecting circuit and the branched electric current.
3 . The semiconductor testing device according to claim 1 , further comprising a constant voltage circuit that applies the predetermined electric voltage between the first terminal and the second terminal of the semiconductor device.
4 . The semiconductor testing device according to claim 1 , wherein the branched electric current is a constant electric current.
5 . A method for testing a semiconductor, comprising:
applying a predetermined electric voltage between a first terminal and a second terminal of a semiconductor device under test;
detecting detection current produced by subtracting branched electric current, branched from measured electric current output from the second terminal based on predetermined electric voltage; and
determining a quality of the semiconductor device based on the detection current.
6 . The method for testing the semiconductor according to claim 5 , further comprising converting the detection current to electric voltage;
wherein the quality of the semiconductor device is determined based on a sum of the detection current depending on the converted electric voltage and the branched electric current.
7 . The method for testing the semiconductor according to claim 5 , wherein the branched electric current is constant electric current.