Semiconductor device with vertical gate and method for fabricating the same
View Patent ↗A vertical channel type non-volatile memory device having a plurality of memory cells stacked along a channel includes the channel configured to be protruded from a substrate, a tunnel insulation layer configured to surround the channel, a plurality of floating gate electrodes and a plurality of control gate electrodes configured to be alternately stacked along the channel, and a charge blocking layer interposed between the plurality of the floating gate electrodes and the plurality of the control gate electrodes alternately stacked.
1. A vertical channel type non-volatile memory device having a plurality of memory cells stacked along a channel, comprising:
the channel configured to be protruded from a substrate;
a tunnel insulation layer configured to surround the channel;
a plurality of floating gate electrodes and a plurality of control gate electrodes alternately stacked along the channel, wherein
a control gate electrode, of the plurality of control gate electrodes, is disposed between each adjacent pair of floating gate electrodes, of the plurality of floating gate electrode; and
a charge blocking layer interposed between each floating gate electrode, of the plurality of the floating gate electrodes, and each control gate electrode of the plurality of the control gate electrodes.
2. The vertical channel type non-volatile memory device of claim 1 , wherein the charge blocking layer surrounds the floating gate electrodes.
3. The vertical channel type non-volatile memory device of claim 1 , wherein in the memory cells,
one floating gate electrode shares two adjacent control gate electrodes.
4. The vertical channel type non-volatile memory device of claim 1 , wherein, for each floating gate electrode of the plurality of floating gate electrodes, two control gate electrodes that are adjacent to the floating gate electrode on different sides of the floating gate electrode are configured to receive a program voltage in order to perform a program operation.
5. The vertical channel type non-volatile memory device of claim 1 , wherein, for each floating gate electrode of the plurality of floating gate electrodes, two control gate electrodes that are adjacent to the floating gate electrode on different sides of the floating gate electrode are configured to receive an erase voltage in order to perform an erase operation.
6. The vertical channel type non-volatile memory device of claim 1 , wherein, for each floating gate electrode of the plurality of floating gate electrodes, two control gate electrodes that are adjacent to the floating gate electrode on different sides of the floating gate electrode are configured to receive a read voltage in order to perform a read operation.