Semiconductor device
View Patent ↗A semiconductor device includes a substrate with one or more active regions and an isolation layer formed to surround an active region and to extend deeper into the substrate than the one or more active regions. The semiconductor further includes a gate electrode, which covers a portion of the active region, and which has one end; portion thereof extending over the isolation layer.
1. A semiconductor device, comprising:
a substrate having formed therein an active region;
an isolation layer formed in the substrate to surround sidewalls of the active region;
a gate electrode configured over the substrate to cover a portion of the active region, the gate electrode having an end portion thereof extending over an upper portion of the isolation layer; and
wherein the active region comprises a second conductive-type deep well and a first conductive-type well formed inside the second conductive-type deep well, each of sidewalls of the second conductive-type deep well being in contact with the isolation layer, each of sidewalls of the first conductive-type well facing a channel widthwise direction of the semiconductor device being in contact with the isolation layer.
2. The semiconductor device of claim 1 , wherein the isolation layer extends deeper into the substrate than the active region.
3. The semiconductor device of claim 1 , wherein the isolation layer is formed through a deep trench isolation (DTI) process.
4. The semiconductor device of claim 1 , wherein the gate electrode has one end thereof along a channel lengthwise direction of the semiconductor device overlapped with a portion of the first conductive-type well, and has another end along a channel widthwise direction of the semiconductor device that extends toward the upper portion of the isolation layer.
5. The semiconductor device of claim 1 , further comprising: a second conductive-type source region formed in the first conductive-type first well to adjacent a first side end of the gate electrode; and a second conductive-type drain region formed in the second conductive-type deep well adjacent a second side end opposite the first side end of the gate electrode.
6. The semiconductor device of claim 1 , wherein both sidewalls of each of the source region and the drain region facing the channel widthwise direction of the semiconductor device are in contact with the isolation layer.
7. The semiconductor device of claim 1 , wherein the gate electrode is connected to the first conductive-type well to function as an anode, the second conductive-type deep well functioning as a cathode.