Semiconductor device and method of manufacturing the same
View Patent ↗In a semiconductor device according to the present invention, two epitaxial layers are formed on a P type substrate. In the substrate and the epitaxial layers, isolation regions are formed to divide the substrate and the epitaxial layers into a plurality of islands. Each of the isolation regions is formed by connecting first and second P type buried layers with a P type diffusion layer. By disposing the second P type buried layer between the first P type buried layer and the P type diffusion layer, a lateral diffusion width of the first P type buried layer is reduced. By use of this structure, a formation region of the isolation region is reduced in size.
1. A method of manufacturing a semiconductor device, comprising the steps of:
preparing a one-conductivity-type semiconductor substrate, and then forming a first opposite-conductivity-type epitaxial layer on the semiconductor substrate;
forming a second opposite-conductivity-type epitaxial layer on the first epitaxial layer after implanting ions of an impurity for forming a first one-conductivity-type buried diffusion layer into the first epitaxial layer; and
forming an isolation region by firstly implanting ions of an impurity for forming a second one-conductivity-type buried diffusion layer from a surface of the second epitaxial layer, then continuously implanting ions of an impurity for forming a one-conductivity-type diffusion layer, and finally performing thermal diffusion, so as to connect the first one-conductivity-type buried diffusion layer, the second one-conductivity-type buried diffusion layer and the one-conductivity-type diffusion layer with one another.
2. The method of manufacturing a semiconductor device, according to claim 1 , wherein ions of the impurity for forming the second one-conductivity-type buried diffusion layer and ions of the impurity for forming the one-conductivity-type diffusion layer are implanted by use of the same resist mask.
3. The method of manufacturing a semiconductor device, according to any one of claims 1 and 2 , wherein, after a LOCOS oxide film is formed in the second epitaxial layer, ions of the impurity for forming the second one-conductivity-type buried diffusion layer and ions of the impurity for forming the one-conductivity-type diffusion layer are implanted from above the LOCOS oxide film.
4. The method of manufacturing a semiconductor device, according to claim 1 , wherein, in the step of implanting ions of the impurity for forming the second one-conductivity-type buried diffusion layer and ions of the impurity for forming the one-conductivity-type diffusion layer, the ion implantation is performed so as to allow impurity concentration peaks of the second one-conductivity-type buried diffusion layer and impurity concentration peaks of the one-conductivity-type diffusion layer to be positioned closer to the surface of the second epitaxial layer than a center of the total thickness of the first and second epitaxial layers.
5. The method of manufacturing a semiconductor device, according to claim 4 , wherein ions of the impurity for forming the second one-conductivity-type buried diffusion layer and ions of the impurity for forming the one-conductivity-type diffusion layer are implanted by use of the same resist mask.