Stackable plasma cleaned via package and method
View Patent ↗A method of forming a stackable plasma cleaned via package includes forming interconnection balls on terminals. The interconnection balls are encapsulated in a package body, e.g., molding compound. Via apertures are formed through the package body to expose the interconnection balls, wherein a contamination is formed on the interconnection balls. The contamination is removed using a plasma cleaning process. By removing the contamination, robust reflow of the interconnection balls is insured thus maximizing yield. Further, the plasma cleaning process is a cost efficient high volume process with no adverse effect on package reliability.
1. A method comprising:
forming an interconnection ball coupled to a terminal;
encapsulating the interconnection ball in a package body;
forming a via aperture through the package body to expose the interconnection ball; and
plasma cleaning the interconnection ball comprising removing a contamination from the interconnection ball, the contamination comprising material of the package body.
2. The method of claim 1 wherein an exposed surface of the interconnection ball is exposed through the via aperture, the contamination being on the exposed surface.
3. The method of claim 1 wherein the contamination comprises a non-conductive contamination.
4. The method of claim 1 wherein the contamination comprises molding compound.
5. The method of claim 1 wherein a process gas used during the plasma cleaning comprises Argon.
6. The method of claim 1 wherein only Argon is used as a process gas used during the plasma cleaning.
7. The method of claim 1 wherein only Argon and Oxygen are used as a process gas used during the plasma cleaning.
8. The method of claim 1 wherein a plasma cleaning time is selected from the group consisting of 1, 3, and 5 minutes.
9. A method comprising:
forming interconnection balls coupled to terminals;
encapsulating the interconnection balls in a package body;
forming via apertures through the package body to expose the interconnection balls, wherein a contamination is formed on the interconnection balls, the contamination comprising material of the package body; and
removing the contamination.
10. The method of claim 9 wherein the removing the contamination comprises plasma cleaning the interconnection balls.
11. The method of claim 9 further comprising coupling an electronic component to a substrate, the terminals being coupled to the substrate.
12. The method of claim 11 wherein the encapsulating further comprises encapsulating the electronic component in the package body.
13. The method of claim 9 wherein the forming via apertures comprises laser-ablating the package body.
14. The method of claim 13 wherein a laser-ablated portion of the package body is redeposited as the contamination.
15. The method of claim 13 wherein a portion of the package body above the interconnection balls in not completely removed during the laser-ablating and remains as the contamination.