Plasma processing apparatus and plasma processing method
View Patent ↗A plasma processing apparatus for applying an etching processing to a wafer by using at least two steps of the etching processing which operate with plasma formed within a pressure-reduced processing chamber, the wafer being located within the processing chamber inside a vacuum vessel, and having a mask on a silicon-composed substrate and a film structure, the film structure including processing-target films located under the mask, wherein the plasma processing apparatus is equipped with a function for processing another different wafer in such a manner that a processing condition at a precedent-stage step of the two steps of the etching processing in the processing of the different wafer is adjusted based on a result obtained by detecting a time which has elapsed until termination of a subsequent-stage step of the two steps of the etching processing.
1. A plasma processing method for applying an etching processing to each of wafers using at least two steps of said etching processing, comprising:
locating one wafer within a pressure-reduced processing chamber inside a vacuum vessel, said one wafer having on a silicon-composed substrate, a film structure which includes a mask and at least one processing-target film located under said mask;
generating plasma within said processing chamber; and
after that, applying an etching processing to said film structure using said at least two steps for said etching processing, wherein
another wafer, having a same film structure as said one wafer and to be processed succeeding to said etching processing of said one wafer, is processed in such a manner that a processing condition at a step corresponding to said first step of said at least two steps as to said one wafer of said etching processing in said processing of said another wafer, is adjusted based on a result obtained by detecting a time between starting and termination of the second step of said etching processing as to said one wafer.
2. The plasma processing method according to claim 1 , further comprising:
processing said at least one processing-target film of said one wafer at said first step during a first processing time determined in advance, said first processing time being included in a first processing recipe for said first step;
detecting light-emission of said plasma generated during said processing of said at least one processing-target film of said one wafer at said second step, thereby to judge an end point of said second step; and
adjusting said processing condition at said step corresponding to said first step as to said another wafer in response to a relationship between a length or duration of said detected time length or duration and a reference length or duration of said time between starting and termination of the second step of said etching processing as to said one wafer.
3. The plasma processing method according to claim 1 , wherein
said at least one processing-target film of said film structure include an antireflection film and a film, said antireflection film being located under said mask, and being composed of an organic material, said film being located under said antireflection film, and being composed of silicon nitride,
said first step processing said antireflection film, and said second step processing said film composed of said silicon nitride.
4. The plasma processing method according to claim 3 , further comprising:
processing said antireflection film at said first step using a gas whose composition includes fluorocarbon and nitrogen; and
processing said film composed of said silicon nitride at said second step using a gas whose composition includes fluorocarbon.