Water-rich stripping and cleaning formulation and method for using same
View Patent ↗The present invention relates to water-rich formulations and the method using same, to remove bulk photoresists, post-etched and post-ashed residues, residues from Al back-end-of-the-line interconnect structures, as well as contaminations. The formulation comprises: hydroxylamine; corrosion inhibitor containing a mixture of alkyl dihydroxybenzene and hydroxyquinoline; an alkanolamine, a water-soluble solvent or the combination of the two; and at least 50% by weight of water.
1. A water-rich stripping and cleaning formulation consisting of:
from 1 to 30% by weight of at least one selected from a hydroxylamine, a hydroxylamine salt compound, and mixtures thereof;
from 0.1 to 5% by weight of a corrosion inhibitor containing a mixture of alkyl dihydroxybenzene and hydroxyquinoline;
one selected from the group consisting of from 5% to 45% by weight of a water-soluble solvent, from 5% to 45% by weight of an alkanolamine which is miscible with said hydroxylamine, and combinations thereof; and
at least 50% by weight of water.
2. The formulation as claimed in claim 1 , wherein the alkyl dihydroxybenzene has linear or branched alkyl group containing 2-6 carbon atoms, and the hydroxyquinoline is selected from group consisting of 2-hydroxyquinoline, 4-hydroxyquinoline, 6-hydroxyquinoline, and 8-hydroxyquinoline.
3. The formulation as claimed in claim 1 , wherein the water-soluble solvent is selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methylpyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.
4. The formulation as claimed in claim 3 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, and the hydroxyquinoline is 8-hydroxyquinoline.
5. The formulation as claimed in claim 1 , wherein the alkanolamine is selected from the group consisting of monoethanolamine, aminoethoxyethanol, aminopropylmorpholine, monoethanolamine, N-methyl ethanolamine, N-ethyl ethanolamine, N,N-dimethylethanolamine, N,N-diethyl ethanolamine, N-methyl diethanolamine, N-ethyl diethanolamine, diethanolamine, triethanol amine, tertiarybutyldiethanol amine, isopropanolamine, 2-amino-1-propanol, 3-amino-1-propanol, 2-amino-1-butanol, isobutanolamine, 2-amino-2-ethoxypropanol, 2-amino-2-ethoxyethanol, and mixtures thereof; and
the water-soluble solvent is selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methylpyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.
6. The formulation as claimed in claim 1 , wherein the alkyl dihydroxybenzene is tertiary butyl catechol, the hydroxyquinoline is 8-hydroxyquinoline, the alkanolamine is monoethanolamine, and the water-soluble solvent is selected from the group consisting of ethylene glycol, propylene glycol, benzyl alcohol, dimethyl sulfoxide, dimethylurea, glycerol, dipropylene glycol monomethyl ether, n-methylpyrrolidone, tetrahydrofurfural alcohol, tetramethoxyethane, and mixtures thereof.