Memory device having three-dimensional gate structure
View Patent ↗Subject matter disclosed herein relates to a memory device, and more particularly to a nonvolatile memory device having a recess structure and methods of fabricating same.
1. A method of forming a flash memory device, the method comprising:
forming an isolation-oxide in a semiconductor substrate by at least partially filling isolation trenches with an oxide;
forming recesses in active regions of said semiconductor substrate by etching said active regions between said isolation-oxide adjacent to said active regions and using said isolation-oxide as an etch barrier for defining, at least in part, said recesses during said etching of said active regions, upper sidewalls of said isolation-oxide being exposed during said etching of said active regions;
forming a tunnel oxide layer by conformally covering bottoms and sidewalls of said recesses; and
at least partially filling said recesses with polysilicon to form floating gates.
2. The method of claim 1 , further comprising:
before forming said recesses in said active regions of said semiconductor substrate,
forming a hard mask layer over said semiconductor substrate; and
forming said isolation trenches by etching said hard mask layer and said semiconductor substrate to a particular depth.
3. The method of claim 1 , further comprising:
forming a planarized surface by chemical-mechanical polishing (CMP) said polysilicon and said isolation-oxide; and
forming an oxide-nitride-oxide (ONO) layer over said planarized surface.
4. The method of claim 3 , further comprising forming a control gate over said ONO layer.
5. The method of claim 1 , wherein said recesses are formed in substantially central regions of gates of transistor portions of said flash memory device.
6. The method of claim 1 , wherein said recesses are formed adjacent to source/drain regions of said active region.
7. The method of claim 1 , wherein said recesses are formed to a particular depth below a top surface of said semiconductor substrate.
8. The method of claim 7 , wherein at least portions of said floating gates are formed below said top surface of said semiconductor substrate.
9. The method of claim 1 , wherein said upper sidewalls of said isolation-oxide are sloped such that an upper surface of said isolation-oxide has a width larger than a width of a bottom surface of said isolation-oxide.
10. The method of claim 1 , wherein a width of a top of said isolation-oxide is greater than a width of said isolation-oxide at an upper surface of said semiconductor substrate.
11. The method of claim 10 , wherein, as seen in a cross-sectional side view, said isolation-oxide has a substantially trapezoid shape.