Semiconductor device
View Patent ↗A serially-connected diode pair made of diodes having a high withstand voltage and a low on-resistance is formed based on a high withstand voltage vertical PNP bipolar transistor process technology. Two of the diode pairs are connected in parallel to form a bridge so that there is formed a high-efficiency full-wave rectifier circuit that is free from a leakage current due to a parasitic transistor. The serially-connected diode pair is formed by connecting a diode composed of a P type semiconductor substrate, that makes an anode, and an N type buried layer, that makes a cathode, and a diode composed of a P+ type conductive layer, that makes an anode, and an N type epitaxial layer, that makes a cathode, in series with an electrode AC 1 . An N+ type buried layer and an N+ type conductive layer are formed to prevent an electric potential at the N+ type buried layer from becoming lower than an electric potential at a P+ type buried layer even when a large positive voltage is applied to the electrode AC 1 , so as to prevent a parasitic PNP transistor composed of the P+ type buried layer, the N+ type buried layer and the P type semiconductor substrate, that make an emitter, a base and a collector, respectively, from turning on.
1. A semiconductor device comprising:
a semiconductor substrate of a first general conductivity type;
an epitaxial layer of a second general conductivity type formed on the semiconductor substrate;
a first buried layer of the second general conductivity type buried in the semiconductor substrate;
a second buried layer of the second general conductivity type buried in the first buried layer and having a higher impurity concentration than the first buried layer;
a third buried layer of the first general conductivity type buried in the second buried layer and the epitaxial layer;
a first conductive layer of the first general conductivity type formed in a first portion of the epitaxial layer so as to be on a peripheral portion of the third buried layer; and
an isolation layer of the first general conductivity type formed in the epitaxial layer so as to isolate the first portion of the epitaxial layer and the third buried layer from other portions of the epitaxial layer,
wherein the semiconductor substrate and the first buried layer are configured to operate as a first diode so that the semiconductor substrate works as an anode and the first buried layer works as a cathode,
the first conductivity layer and the epitaxial layer are configured to operate as a second diode so that the first conductive layer works as an anode and the epitaxial layer works as a cathode, and
the first diode and the second diode are connected serially.
2. The semiconductor device of claim 1 , wherein the second buried layer physically in contact with a bottom of the third buried layer.
3. The semiconductor device of claim 1 , further comprising a second conductive layer of the second general conductivity type formed in the first portion of the epitaxial layer and having a higher impurity concentration than the epitaxial layer, a bottom of the second conductive layer touching the second buried layer or extending to a vicinity of the second buried layer.
4. The semiconductor device of claim 3 , further comprising a first contact layer of the second general conductivity type formed in a surface portion of the first portion of the epitaxial layer adjacent the first conductive layer, a second contact layer of the second general conductivity type formed in a surface portion of the second conductive layer, a first electrode electrically connected to the first conductive layer and the second contact layer, and a second electrode electrically connected to the first contact layer.
5. The semiconductor device of claim 3 , wherein the second conductive layer surrounds the first conductive layer.
6. The semiconductor device of claim 4 , further comprising another first diode that is formed in a second portion of the epitaxial layer in the same way as the first diode and another second diode that is formed in the second portion of the epitaxial layer in the same way as the second diode, the another first diode and the another second diode being connected serially, the isolation layer isolating the first portion of the epitaxial layer from the second portion of the epitaxial layer, and the second electrode of the first and second diodes and the second electrode of the another first and second diodes are electrically connected.
7. The semiconductor device of claim 6 , wherein the first and second diodes and the another first and second diodes are formed in the same semiconductor substrate so as to form a bridge circuit.
8. The semiconductor device of claim 1 , wherein the first conductive layer surrounds a portion of the first portion of the epitaxial layer that is on the third buried layer.