Schottky diode and method for fabricating the same
View Patent ↗A Schottky diode includes a deep well formed in a substrate, an isolation layer formed in the substrate, a first conductive type guard ring formed in the deep well along an outer sidewall of the isolation layer and located at a left side of the isolation layer, a second conductive type well formed in the deep well along the outer sidewall of the isolation layer and located at a right side of the isolation layer, an anode electrode formed over the substrate and coupled to the deep well and the guard ring, and a cathode electrode formed over the substrate and coupled to the well. A part of the guard ring overlaps the isolation layer.
1. A Schottky diode comprising:
a deep well in a substrate;
an isolation layer in the substrate;
a guard ring of a first conductive type in the deep well comprising a first region and a second region and located at one side of the isolation layer;
a well region of a second conductive type in the deep well and located at an opposite side of the isolation layer;
a first electrode over the substrate and coupled to the deep well and the guard ring; and a second electrode over the substrate and coupled to the well region,
wherein the first region of the guard ring overlaps with the isolation layer and the second region of the guard ring does not overlap with the isolation layer,
wherein a width of a top surface of the first region is different from a width of a top surface of the second region, and
wherein the well region comprises:
a third impurity region having a third doping concentration being in contact with the second electrode;
a second impurity region having a second doping concentration below the third impurity region; and
a first impurity region having a first doping concentration below the second impurity region, wherein the third doping concentration is greater than the first doping concentration.
2. The Schottky diode of claim 1 , wherein the isolation layer has a ring shape.
3. The Schottky diode of claim 1 , wherein the guard ring has a depth smaller than a depth of the isolation layer from a top surface of the substrate.
4. The Schottky diode of claim 1 , wherein the isolation layer has a depth smaller than a depth of the well region from a top surface of the substrate.
5. The Schottky diode of claim 4 , wherein a lower portion of the well region surrounds a portion of a lower surface of the isolation layer.
6. The Schottky diode of claim 1 , wherein the first electrode and the second electrode include a metal silicide layer.
7. The Schottky diode of claim 1 , wherein the first conductive type and the second conductive type are complementary to each other, the first conductive type is a P type, and the second conductive type is an N type.
8. The Schottky diode of claim 1 , wherein the width of a top surface of the first region is smaller than the width of a top surface of the second region.
9. A Semiconductor device comprising:
A Schottky diode comprising:
a deep well in a substrate;
an isolation layer in the substrate;
a guard ring of a first conductive type in the deep well comprising a first region and a second region and located at one side of the isolation layer;
a well region of a second conductive type in the deep well and located at an opposite side of the isolation layer;
a first electrode over the substrate and coupled to the deep well and the guard ring; and a second electrode over the substrate and coupled to the well region,
wherein the first region of the guard ring overlaps with the isolation layer and the second region of the guard ring does not overlap with the isolation layer,
wherein a width of a top surface of the first region is different from a width of a top surface of the second region, and
wherein the width of a top surface of the second region is substantially the same as a width of a bottom surface of the second region.
10. The semiconductor device of claim 9 , wherein overlapping width between the guard ring and the isolation layer is smaller than the width of the guard ring not overlapping the isolation layer.
11. The semiconductor device of claim 9 , wherein the isolation layer has a ring shape.
12. The semiconductor device of claim 9 , wherein the guard ring has a depth smaller than a depth of the isolation layer on a basis of an upper surface of the substrate.
13. The semiconductor device of claim 9 , wherein the isolation layer has a depth smaller than a depth of the well region on the basis of the upper surface of the substrate.
14. The semiconductor device of claim 13 , wherein a lower portion of the well region surrounds a portion of a lower surface of the isolation layer.
15. The semiconductor device of claim 9 , wherein the well region comprises:
a third impurity region having a third doping concentration being in contact with the second electrode;
a second impurity region having a second doping concentration below the third impurity region; and
a first impurity region having a first doping concentration below the second impurity region, wherein the third doping concentration is greater than the first doping concentration.
16. The semiconductor device of claim 9 , wherein the first electrode and the second electrode include a metal silicide layer.
17. The semiconductor device of claim 9 , wherein the width of a top surface of the first region is smaller than the width of a top surface of the second region.
18. A semiconductor device of claim 9 , wherein the width of a top surface of the first region is substantially the same as a width of a bottom surface of the first region.
19. A Schottky diode comprising:
a deep well in a substrate;
an isolation layer in the substrate;
a guard ring of a first conductive type in the deep well comprising a first region and a second region and located at one side of the isolation layer;
a well region of a second conductive type in the deep well and located at an opposite side of the isolation layer;
a first electrode over the substrate and coupled to the deep well and the guard ring; and
a second electrode over the substrate and coupled to the well region,
wherein the first region of the guard ring overlaps with the isolation layer and the second region of the guard ring does not overlap with the isolation layer, and
wherein the well region comprises:
a third impurity region having a third doping concentration being in contact with the second electrode;
a second impurity region having a second doping concentration below the third impurity region; and
a first impurity region having a first doping concentration below the second impurity region,
wherein the third doping concentration is greater than the first doping concentration.