Group 4 metal precursors for metal-containing films
View Patent ↗The present invention is related to a family of Group 4 metal precursors represented by the formula: M(OR 1 ) 2 (R 2 C(O)C(R 3 )C(O)OR 1 ) 2 wherein M is a Group 4 metals of Ti, Zr, or Hf; wherein R 1 is selected from the group consisting of a linear or branched C 1-10 alkyl and a C 6-12 aryl, preferably methyl, ethyl or n-propyl; R 2 is selected from the group consisting of branched C 3-10 alkyls, preferably iso-propyl, tert-butyl, sec-butyl, iso-butyl, or tert-amyl and a C 6-12 aryl; R 3 is selected from the group consisting of hydrogen, C 1-10 alkyls, and a C 6-12 aryl, preferably hydrogen. In a preferred embodiment of this invention, the precursor is a liquid or a solid with a melting point below 60° C.
1. A Group 4 metal precursor represented by the formula:
wherein M is a Group 4 metal selected from the group consisting of Ti, Zr, and Hf; wherein R 1 is selected from the group consisting of a linear or branched C 1-10 alkyl group and a C 6-12 aryl group; R 2 is selected from the group consisting of branched C 3-10 alkyl group and a C 6-12 aryl group; and R 3 is selected from the group consisting of hydrogen, a C 1-10 alkyl group, and a C 6-12 aryl group wherein R 1 in the formula is the same substituent.
2. The precursor of claim 1 wherein R 1 is selected from the group consisting of methyl, ethyl, and n-propyl.
3. The precursor of claim 1 wherein R 2 is tert-butyl.
4. The precursor of claim 3 wherein R 3 is hydrogen.
5. The precursor of claim 1 wherein M is zirconium and R 1 is selected from the group consisting of a branched C 3-10 alkyl group.
6. The precursor of claim 1 , wherein M is titanium.
7. The precursor of claim 6 wherein R 1 is selected from the group consisting of a linear C 1-10 alkyl.
8. A titanium precursor represented by the formula:
wherein R 1 is selected from the group consisting of methyl, ethyl, and n-propyl wherein R 1 in the formula is the same substituent.
9. The precursor of claim 8 where R 1 is methyl.
10. The precursor of claim 8 where R 1 is ethyl.
11. The precursor of claim 8 where R 1 is n-propyl.
12. A solution of the precursor of claim 1 and a solvent.
13. The solution of claim 12 wherein the solvent is selected from the group consisting of octane, ethylcyclohexane, dodecane, toluene, xylene, mesitylene, diethylbezene, and mixture thereof.