Iron silicide sputtering target and method for production thereof
View Patent ↗An iron silicide sputtering target in which the oxygen as a gas component in the target is 1000 ppm or less and a method of manufacturing such an iron silicide sputtering target are provided. The method includes the steps of melting/casting high purity iron and silicon under high vacuum to prepare an alloy ingot, subjecting the ingot to gas atomization with inert gas to prepare fine powder, and thereafter sintering the fine powder. The amount of impurities in the target will be reduced, the thickness of a βFeSi 2 film during deposition can be made thick, the generation of particles will be reduced, a uniform and homogenous film composition can be yielded, and the sputtering characteristics will be favorable. The foregoing manufacturing method is able to stably produce the target.
1. A method of manufacturing an iron silicide sputtering target, comprising the steps of melting and casting high purity iron and silicon under high vacuum to prepare an alloy ingot, subjecting the ingot to gas atomization with inert gas to prepare fine powder, and thereafter sintering the fine powder to provide an iron silicide sputtering target such that the iron silicide sputtering target has a content of oxygen as a gas component of 1000 ppm or less, a relative density of at least 90%, and a target texture with an average crystal grain size of 300 μm or less, said target texture being substantially a ζ a phase, or having a primary phase that is a ζ a phase.
2. A method according to claim 1 , wherein the high purity iron and silicon are melted with a cold crucible melting process employing a water-cooled copper crucible.
3. A method according to claim 2 , wherein the fine powder is sintered by one of hot pressing, hot isostatic pressing, and spark plasma sintering.
4. A method according to claim 3 , wherein, before said sintering step, the fine powder is heated under a hydrogen atmosphere, subjected to decarbonization and deoxidization processing, and subjected to degasification processing under a vacuum atmosphere.
5. A method according to claim 1 , wherein the fine powder is sintered by one of hot pressing, hot isostatic pressing, and spark plasma sintering.
6. A method according to claim 1 , wherein, before said sintering step, the fine powder is heated under a hydrogen atmosphere, subjected to decarbonization and deoxidization processing, and subjected to degasification processing under a vacuum atmosphere.
7. A method according to claim 4 , wherein the high purity iron used as a raw material during said melting step has a purity of 3N5 (99.95wt %) or greater and the silicon used as a raw material during said melting step has a purity of 5N or greater, and wherein said iron silicide sputtering target formed during said sintering step consists of iron, silicon and unavoidable impurities.
8. A method according to claim 1 , wherein the high purity iron used as a raw material during said melting step has a purity of 3N5 (99.95wt %) or greater and the silicon used as a raw material during said melting step has a purity of 5N or greater, and wherein said iron silicide sputtering target formed during said sintering step consists of iron, silicon and unavoidable impurities.