Dual substrate MEMS plate switch and method of manufacture
View Patent ↗Systems and methods for forming an electrostatic MEMS plate switch include forming a deformable plate on a first substrate, forming the electrical contacts on a second substrate, and coupling the two substrates using a hermetic seal. The deformable plate may have at least one shunt bar located at a nodal line of a vibrational mode of the deformable plate, so that the shunt bar remains relatively stationary when the plate is vibrating in that vibrational mode. A hermetic seal may be made around the device with a larger, secondary enclosure. Electrical access to the deformable plate may be accomplished by an electrical path which is independent of the seal. The electrical path may include a via through the first substrate or the second substrate, or a flash deposited on an external region of the switch.
1. A method for manufacturing an electrostatic MEMS device, comprising:
providing a silicon-on-insulator substrate including a silicon device layer, and insulating layer and a silicon handle layer;
forming a first plate in the device layer of the silicon-on-insulator substrate and suspended adjacent to the handle layer of the silicon-on-insulator substrate, wherein the first plate is coupled to the silicon-on-insulator substrate by a plurality of spring beams;
forming an electrical contact on a second substrate, wherein the first plate is configured to move toward the at least one electrical contact when a voltage is applied between the first plate and the electrical contact;
coupling the device layer of the silicon-on-insulator substrate to the second substrate with a seal that seals the MEMS device;
forming and an electrical path which delivers the voltage to the first plate, wherein the electrical path is independent of the seal that seals the MEMS device.
2. The method of claim 1 , further comprising:
forming a secondary hermetic enclosure around the electrostatic MEMS device.
3. The method of claim 2 , wherein the voltage is delivered to the first plate by a through wafer via formed in the first substrate.
4. The method of claim 2 , wherein the first voltage is delivered to the first plate by a layer of metal deposited on at least a portion of the switch, which provides an electrical path from the first plate to a circuit board.
5. The method of claim 1 , further comprising:
forming at least one electrical via through a thickness of the second substrate, and electrically coupling the at least one electrical via to the at least one electrical contact.
6. The method of claim 5 , wherein forming the at least one electrical via comprises:
forming at least one blind hole with a dead end wall on a front side of the second substrate;
forming a seed layer in the at least one blind hole;
depositing a conductive material onto the seed layer; and
removing material from a rear side of the second substrate to remove the dead-end wall of the at least one blind hole.
7. The method of claim 6 , wherein depositing a conductive material onto the seed layer comprises plating copper onto the seed layer.
8. The method of claim 1 , wherein coupling the first substrate to the second substrate with a seal comprises:
depositing a first metal between the first substrate and the second substrate; and
depositing a second metal between the first substrate and the second substrate; and
coupling the first substrate to the second substrate by heating the first metal and the second metal to at least a melting point of at least one of the first metal and the second metal, to form a substantially hermetic alloy seal around the MEMS device.
9. The method of claim 1 , wherein the second substrate comprises at least one of a silicon wafer and a silicon-on-insulator substrate.
10. The method of claim 9 , wherein forming the first plate suspended over the first substrate comprises:
etching a plurality of holes into a device layer of the silicon-on-insulator substrate;
etching a dielectric layer beneath the device layer of the silicon-on-insulator substrate through the plurality of holes; and
etching an outline of the first plate in the device layer of the silicon-on-insulator substrate.
11. An electrostatic MEMS device, comprising:
a first plate formed in a device layer of a first silicon-on-insulator substrate having a device layer, dielectric layer and a silicon device layer, wherein the first plate is suspended adjacent to the handle layer of the silicon-on-insulator substrate, and coupled to the substrate by at least one spring beam;
an electrostatic plate formed on a second substrate, wherein the first plate is configured to move toward the electrostatic plate;
a seal which couples the device layer of the first substrate to the second substrate, and seals the MEMS switch, and wherein when a first voltage is delivered to the first plate and a second voltage is delivered to the at least one electrostatic plate, an attractive force arises between the first plate and the at least one electrostatic plate, and wherein the first voltage is delivered to the first plate along an electrical path that is independent of the seal.
12. The electrostatic MEMS device of claim 11 , wherein the first voltage is delivered to the first plate by a layer of metal deposited on an external portion of the switch, which provides an electrical path from the first plate to a circuit board.
13. The electrostatic MEMS device of claim 11 , wherein the at least one additional via is formed in the second substrate.
14. The electrostatic MEMS device of claim 12 , further comprising at least one of a microfabricated capacitor, resistor and inductor.
15. The electrostatic MEMS device of claim 12 , wherein the seal further comprises a rigid standoff that establishes the separation between the second substrate and the silicon-on-insulator substrate.
16. The electrostatic MEMS device of claim 11 , further comprising a secondary enclosure which encloses the electrostatic MEMS device with a hermetic seal.
17. The electrostatic MEMS device of claim 11 , further comprising:
electrical vias formed through a thickness of the second substrate; and
an electrostatic second plate formed on the second substrate.
18. The electrostatic MEMS device of claim 11 , further comprising:
a plurality of holes formed through a thickness of the first plate, wherein the plurality of holes is disposed in at least one of the following ways: substantially along a latitudinal axis of the first plate, and in a close-packed hexagonal array.
19. The electrostatic MEMS device of claim 11 , wherein the seal comprises:
a gold/indium alloy which bonds the first substrate to the second substrate with a substantially hermetic seal around the MEMS device.
20. The electrostatic MEMS device of claim 11 , wherein the first plate has at least one shunt bar, located substantially on a nodal line of a vibrational mode of the first plate.
21. The electrostatic MEMS device of claim 11 , wherein electrical access to the electrostatic MEMS device is accomplished with wire bond connecting a bump bond on a printed circuit board with the electrostatic MEMS device supported on the printed circuit board.
22. The electrostatic MEMS device of claim 11 , wherein electrical access to the electrical plate and the at least one additional via from traces on a printed circuit board is accomplished by bump bonding the electrostatic MEMS device to the traces on the printed circuit board.