Method of depositing amorphus aluminium oxynitride layer by reactive sputtering of an aluminium target in a nitrogen/oxygen atmosphere
View Patent ↗A method of depositing an amorphous layer of AlON includes providing an aluminum sputter target in a chamber, exposing the target and chamber to O 2 to saturate the exposed surfaces with oxygen, introducing a substrate into the chamber in an atmosphere containing at least nitrogen and oxygen, and sputtering the target in the nitrogen and oxygen atmosphere to deposit an amorphous AlON film.
1. A method of forming an amorphous layer of AlON comprising steps of:
(a) providing an aluminium sputter target in a chamber;
(b) saturating exposed surfaces of the target and exposed inner surfaces of the chamber with oxygen;
(c) introducing a substrate into the chamber in an atmosphere containing at least nitrogen and oxygen; and
(d) sputtering the target in the nitrogen and oxygen atmosphere to deposit an amorphous AlON film on the substrate.
2. A method as claimed in claim 1 , further comprising a step of cleaning the target between steps (a) and (b).
3. A method as claimed in claim 2 wherein the cleaning step comprises exposing the target to an Argon plasma.
4. A method as claimed in claim 2 , wherein the target is exposed to an argon/nitrogen plasma between the cleaning step and step (b).
5. A method as claimed in claim 1 , wherein in step (b) the oxygen is supplied in an argon/nitrogen plasma.
6. A method as claimed claim 1 , wherein the substrate has a seed layer.
7. A method as claimed in claim 6 , wherein the seed layer is AlON or Al 2 O 3 .
8. A method as claimed in claim 1 , wherein oxygen is flowed into the chamber in step (c) at a rate of 5-20 sccm.
9. A method as claimed in claim 1 , wherein the sputtering step takes place using a pulsed DC diode configuration.
10. A method as claimed in claim 1 , wherein argon is used as a sputter gas in step (d).
11. A method as claimed claim 1 , wherein the substrate is supported on a platen and the platen is maintained at temperature in the range around 50° C. to around 400° C.
12. A method as claimed in claim 1 wherein step (b) lasts for between around 40 and 200 seconds.
13. A method as claimed in claim 12 , wherein step (b) lasts for around 60 seconds.
14. A method as claimed in claim 1 , wherein the oxygen content of the deposited film is at least around 25 at % and less than around 40 at %.
15. A method as claimed in claim 1 , wherein the layer is a hard mask.
16. A method as claimed in claim 15 , wherein the substrate is or includes a semi-conductor wafer.
17. A sputtering method comprising:
providing a sputter target comprising Al in a chamber, wherein the target has a surface exposed in the chamber and the chamber has exposed inner metal surfaces;
saturating the exposed surfaces of the target and chamber with oxygen; and
forming a layer comprising amorphous AlON on a substrate in the chamber by sputtering the target in an atmosphere containing nitrogen and oxygen after the surfaces of the target and chamber have been saturated with oxygen.
18. The method as claimed in claim 17 , further comprising cleaning the target with an argon plasma before the target is sputtered.
19. A method as claimed in claim 18 , further comprising nitriding the target after the target has been cleaned with the argon plasma and before the target is sputtered.
20. A method as claimed in claim 17 , wherein the saturating of the surfaces of the target and chamber comprises introducing O 2 into the chamber.