Post deposition adjustment of chalcogenide composition in chalcogenide containing semiconductors
View Patent ↗The concentration of a constituent within a chalcogenide film used to form a chalcogenide containing semiconductor may be adjusted post deposition by reacting the chalcogenide film with a material in contact with the chalcogenide film. For example, a chalcogenide film containing tellurium may be coated with a titanium layer. Upon the application of heat, the titanium may react with the tellurium to a controlled extent to reduce the concentration of tellurium in the chalcogenide film.
1. A method, comprising:
depositing a chalcogenide film on a first electrode, wherein a portion of the chalcogenide film contacts the first electrode, wherein the first electrode includes titanium nitride;
depositing a titanium film over the chalcogenide film;
depositing a second electrode on the titanium film, wherein the second electrode includes titanium nitride; and
altering, the composition of the chalcogenide film.
2. The method of claim 1 , wherein altering the composition of the chalcogenide film comprises reducing the concentration of one component of the chalcogenide film.
3. the method of claim 1 , wherein altering the composition of the chalcogenide film comprises applying heat to react a constituent of the chalcogenide film with the titanium film.
4. The method of claim 1 , wherein altering the composition of the chalcogenide film further comprises diffusing a component or the chalcogenide film into the titanium film.
5. The method of claim 1 , wherein the chalcogenide film includes tellurium, and wherein the titanium film is reactive with the tellurium.
6. The method of claim 1 , wherein depositing the chalcogenide film on the electrode comprises depositing the ehalcogenide film on a surface of the electrode.
7. A method comprising:
depositing a chalcogenide film on a first electrode, wherein a portion of the chalcogenide film contacts the first electrode, wherein the first electrode includes titanium nitride;
depositing a metallic film on the chalcogenide film, wherein the metallic film includes titanium;
depositing a second electrode on the metallic film, wherein the second electrode includes titanium nitride; and
heating the chalcogenide film and the metallic film to reduce the concentration of material of the chalcogenide film.
8. The method of claim 7 , wherein the chalcogenide film comprises a germanium, antimony, and tellurium (GST) alloy.
9. The method of claim 8 , further comprising reacting the metallic film with at least the tellurium of the GST alloy.
10. A method, comprising;
forming a chalcogenide film on a first electrode, wherein a portion of the chalcogenide film contacts the first electrode, wherein the first electrode includes titanium nitride;
depositing another material on the chalcogenide film, wherein the another material includes titanium;
depositing a second electrode on the metallic film, wherein the second electrode includes titanium nitride; and
treating the chalcogenide film to reduce the concentration of a material of the chalcogenide film.
11. The method of claim 10 , wherein treating the chalcogenide film to reduce the concentration of the material of the chalcogenide film comprises applying heat to react the another material with the material of the chalcogenide film.
12. The method of claim 11 , wherein the material includes tellurium.
13. A method, comprising:
forming a first electrode;
depositing a chalcogenide film on the first electrode, wherein a portion of the chalcogenide film contacts the first electrode;
forming a metallic layer on the chalcogenide film, wherein the metallic layer includes titanium;
forming a second electrode on the metallic film, wherein the second electrode includes titanium nitride; and
altering a composition of the chalcogenide film by reacting the chalcogenide film with the metallic layer.
14. The method of claim 13 , wherein changing a composition of the chalcogenide film by reacting the chalcogenide film with the metallic layer comprises heating the chalcogenide film and the metallic layer.
15. The method of claim 14 , wherein changing a composition of the chalcogenide film by reacting the chalcogenide film with the metallic layer comprises transferring a portion of a material of the chalcogenide film to the metallic layer responsive to the heating of the chalcogenide film and the metallic layer.