Integrated passive device structure and method
View Patent ↗An integrated passive device (IPD) structure includes an electronic component having an active surface and an opposite inactive surface. The IPD structure further includes a passive device structure extending through the electronic component between the active surface and the inactive surface and having a portion(s) formed on the active surface, the inactive surface, or both the active and inactive surfaces. Accordingly, the IPD structure includes the functionality of the electronic component, e.g., an integrated circuit chip, and of the passive device structure, e.g., one or more capacitors, resistors, inductors, or surface mounted components. By integrating the passive device structure with the electronic component to form the IPD structure, separate mounting of passive component(s) to the substrate is avoided this minimizing the substrate size.
1. An integrated passive device (IPD) structure comprising:
a passive device support structure comprising:
a first surface; and
an opposite second surface; and
a passive device structure comprising:
a first through passive device structure extending through the passive device support structure between the first surface and the second surface, wherein the first through passive device structure comprises at least one resistor;
a second through passive device structure extending through the passive device support structure between the first surface and the second surface, wherein the second through passive device structure comprises at least one resistor; and
a first surface passive device structure coupled to respective ends of the first and second through passive device structures to form a resistor that comprises the first through passive device structure, the first surface passive device structure, and the second through passive device structure, the first surface passive device structure being further coupled to the first surface.
2. The IPD structure of claim 1 wherein the first surface is an active surface of the passive device support structure, the active surface comprising active devices formed therein, wherein the passive device support structure further comprises bond pads on the active surface, the bond pads providing input/output terminals for the active devices.
3. The IPD structure of claim 2 wherein the passive device structure further comprises active surface passive device bond pads on the active surface, the active surface passive device bond pads providing input/output terminals for the passive device structure.
4. The IPD structure of claim 2 wherein the second surface is an inactive surface of the passive device support structure, the passive device structure further comprises inactive surface passive device bond pads on the inactive surface, the inactive surface passive device bond pads providing input/output terminals for the passive device structure.
5. The IPD structure of claim 1 wherein the first surface is an inactive surface of the passive device support structure.
6. The IPD structure of claim 1 wherein the passive device structure further comprises a second surface passive device structure coupled to the first through passive device structure, the second surface passive device structure being further coupled to the second surface.
7. The IPD structure of claim 1 wherein the first through passive device structure comprises electrically conductive through vias.
8. The IPD structure of claim 7 wherein the first surface passive device structure comprises:
a circuit pattern coupled to the through vias, the circuit pattern comprising lands; and
an electronic component coupled to the lands.
9. The IPD structure of claim 7 wherein the first surface passive device structure comprises:
a resistor comprising terminals coupled to the through vias.
10. The IPD structure of claim 7 wherein the first surface passive device structure comprises:
a first capacitor plate coupled to a first through via of the through vias; and
a second capacitor plate coupled to a second through via of the through vias.
11. The IPD structure of claim 7 wherein a first set of the through vias form a first capacitor plate of a capacitor and a second set of the through vias form a second capacitor plate of the capacitor.
12. The IPD structure of claim 7 wherein the first surface passive device structure comprises:
a first inductor comprising terminals coupled to the through vias.
13. The IPD structure of claim 12 further comprising a second inductor coupled to the second surface, the second inductor comprising terminals coupled to the through vias.
14. The IPD structure of claim 7 wherein the first surface passive device structure comprises:
a first circuit pattern, the passive device structure further comprising a second circuit pattern coupled to the second surface, the first circuit pattern and the second circuit pattern coupling the through vias together in series to form an inductor.
15. The IPD structure of claim 1 wherein the first surface passive device structure comprises:
a first circuit pattern, the passive device structure further comprising a second circuit pattern coupled to the second surface, the first circuit pattern and the second circuit pattern coupling the at least one resistor of the first through passive device structure together.
16. The IPD structure of claim 1 , wherein the passive device structure further comprises:
a third through passive device structure extending through the passive device support structure between the first surface and the second surface, wherein the third through passive device structure comprises at least one resistor; and
a second surface passive device structure coupled to the second and third through passive device structures to form a resistor that comprises the first through passive device structure, the first surface passive device structure, the second through passive device structure, the second surface passive device structure, and the third through passive device structure, the first surface passive device structure being further coupled to the second surface.