Semiconductor structure including high voltage device
View Patent ↗A high voltage device includes a substrate with a device region defined thereon. A gate stack is disposed on the substrate in the device region. A channel region is located in the substrate beneath the gate stack, while a first diffusion region is located in the substrate on a first side of the gate stack. A first isolation structure in the substrate, located on the first side of the gate stack, separates the channel and the first diffusion region. The high voltage device also includes a first drift region in the substrate coupling the channel to the first diffusion region, wherein the first drift region comprises a non-uniform depth profile conforming to a profile of the first isolation structure.
1. A high voltage device comprising:
a substrate with a device region defined thereon;
a first isolation structure in the substrate, the first isolation structure comprising first and second opposing sidewalls and a bottom portion connecting the first and second sidewalls;
a gate stack disposed on the substrate in the device region, the gate stack having first and second opposing sides, the first side being adjacent to the first isolation structure;
a channel region located in the substrate beneath the gate stack;
a first diffusion region located in the substrate, the first isolation region is separated from the channel by the first isolation structure; and
a first drift region in the substrate coupling the channel to the first diffusion region, wherein the first drift region comprising a non-uniform depth profile conforming to the profile of the bottom portion and the first sidewall, and at least a portion of the profile of the second sidewall of the first isolation structure.
2. The high voltage device of claim 1 further comprising a first device region isolation structure located in the substrate isolating the first diffusion region from other device regions.
3. The high voltage device of claim 2 wherein the first drift region overlaps a portion of the first device region isolation structure, the non-uniform depth profile of the first drift region conforming to the profile of the first isolation structure and a profile of the first device region isolation structure.
4. The high voltage device of claim 1 wherein the first isolation structure overlaps the first side of the gate stack.
5. The high voltage device of claim 4 further comprising a first device region isolation structure located in the substrate isolating the first diffusion region from other device regions.
6. The high voltage device of claim 5 wherein the first drift region overlaps a portion of the first device region isolation structure, the non-uniform depth profile of the first drift region conforming to the profile of the first isolation structure and a profile of the first device region isolation structure.
7. The high voltage device of claim 1 wherein a portion of the first drift region underlying the first diffusion region is deeper than a depth of the first diffusion region.
8. The high voltage device of claim 7 further comprising a first device region isolation structure located in the substrate isolating the first diffusion region from other device regions, wherein the first drift region overlaps a portion of the first device isolation structure, the non-uniform depth profile of the first drift region conforming to the profile of the first isolation structure and a profile of the first device region isolation structure.
9. The high voltage device of claim 1 further comprising:
a second diffusion region located in the substrate on a second side of the gate stack;
a second isolation structure in the substrate, the second isolation structure located on the second side of the gate separating the channel and the second diffusion region; and
a second drift region in the substrate coupling the channel to the second diffusion region, the second drift region comprising a non-uniform depth profile conforming to a profile of the second isolation structure.
10. The high voltage device of claim 9 further comprising a second device region isolation structure located in the substrate isolating the second diffusion region from other device regions, wherein the second drift region overlaps a portion of the second device region isolation structure, the non-uniform depth profile of the second drift region conforming to the profile of the second isolation structure and a profile of the second device region isolation structure.
11. The high voltage device of claim 9 wherein the second isolation structure overlaps the second side of the gate stack.
12. The high voltage device of claim 11 further comprising a second device region isolation structure located in the substrate isolating the second diffusion region from other device regions, wherein the second drift region overlaps a portion of the second device region isolation structure, the non-uniform depth profile of the second drift region conforming to the profile of the second isolation structure and a profile of the second device region isolation structure.
13. The high voltage device of claim 9 wherein a portion of the non-uniform depth profile of the second drift region is deeper than the second diffusion region.
14. The high voltage device of claim 13 further comprising a second device region isolation structure located in the substrate isolating the second diffusion region from other device regions, wherein the second drift region overlaps a portion of the second device region isolation structure, the non-uniform depth profile of the second drift region conforming to the profile of the second isolation structure and a profile of the second device region isolation structure.
15. The high voltage device of claim 7 wherein a portion of the first drift region underlying a base of the first isolation structure is deeper than the portion of the first drift region underlying the first diffusion region.
16. The high voltage device of claim 11 wherein a portion of the second drift region underlying a base of the second isolation structure is deeper than the portion of the second drift region underlying the second diffusion region.
17. A high voltage device comprising:
a substrate with a device region;
a first isolation structure in the substrate within the device region, the first isolation structure comprising first and second opposing sidewalls and a bottom portion connecting the first and second sidewalls;
a first doped region in the substrate in the device region, wherein the first doped region comprises a non-uniform depth conforming to the profile of the bottom portion and the first sidewall, and at least a portion of the profile of the second sidewall of the first isolation structure.
18. The high voltage device of claim 17 further comprising:
a gate stack disposed on the substrate in the device region, the gate stack having first and second opposing sides, the first side being adjacent to the first isolation structure; and
a channel region located in the substrate beneath the gate stack.
19. The high voltage device of claim 18 further comprising a first diffusion region in the substrate adjacent to the first isolation structure, wherein the first diffusion region is separated from the channel by the first isolation structure.
20. The high voltage device of claim 19 wherein a portion of the first doped region underlying a base of the first isolation structure is deeper than the portion of the first doped region underlying the first diffusion region.