Wafers including patterned back side layers thereon
View Patent ↗A method of processing a wafer including a plurality of integrated circuit devices on a front side of the wafer, may include thinning the wafer from a back side opposite the front side. After thinning the wafer, a back side layer may be provided on the back side of the thinned wafer opposite the front side, and the back side layer may be configured to counter stress on the front side of the wafer including the plurality of integrated circuit devices thereon. After providing the back side layer, the plurality of integrated circuit devices may be separated. Related structures are also discussed.
1. An electronic structure comprising:
a continuous wafer including opposing front and back sides wherein the back side of the wafer is continuous; a plurality of integrated circuit devices on the front side of the continuous wafer; and a back side layer on the continuous back side of the continuous wafer opposite the front side wherein the back side layer has a pattern therein so that portions of the continuous back side of the continuous wafer are exposed through the pattern in the back side layer, wherein the pattern in the back side laver is configured to counter stresses on the front side of the continuous wafer.
2. An electronic structure according to claim 1 wherein the pattern in the back side layer is configured to provide asymmetric counter stresses on the continuous back side of the continuous wafer aligned with respect to asymmetric stresses on the front side of the continuous wafer.
3. An electronic structure according to claim 1 wherein the pattern in the back side layer exposes streets between individual integrated circuit devices wherein the streets define portions of the continuous wafer separating the integrated circuit devices.
4. An electronic structure according to claim 1 wherein the back side layer comprises an epoxy.
5. An electronic structure according to claim 1 further comprising:
a plurality of interconnection bumps on the front side of the continuous wafer.
6. An electronic structure according to claim 5 wherein the plurality of interconnection bumps comprise interconnection solder bumps.
7. An electronic structure according to claim 5 further comprising:
a protective layer on the plurality of interconnection solder bumps so that the interconnection solder bumps are between the protective layer and the continuous wafer.
8. An electronic structure according to claim 1 wherein the back side layer comprises a thermoset epoxy.
9. An electronic structure according to claim 1 wherein the continuous wafer and the back side layer comprise different materials.
10. An electronic structure according to claim 1 wherein the continuous wafer comprises a continuous semiconductor wafer and wherein the back side layer comprises a non-semiconductor material.
11. An electronic structure according to claim 1 wherein the back side layer comprises a silica filled epoxy.
12. An electronic structure according to claim 11 wherein the back side layer has a thickness in the range of about 100 micrometers to about 300 micrometers.
13. An electronic structure according to claim 1 wherein the back side layer comprises a thermoplastic.
14. An electronic structure according to claim 1 wherein the back side layer comprises a thermoset epoxy with carbon black impregnated therein.
15. An electronic structure according to claim 14 wherein the back side layer has a thickness in the range of about 40 micrometers to about 50 micrometers.
16. An electronic structure according to claim 1 wherein the continuous wafer has a thickness in the range of about 10 mils to about 12 mils.
17. An electronic structure according to claim 1 wherein the back side layer comprises an epoxy layer having a thickness in the range of about 25 micrometers to about 75 micrometers.
18. An electronic structure comprising:
a continuous wafer including opposing front and back sides wherein the back side of the wafer is continuous;
a plurality of integrated circuit devices on the front side of the continuous wafer; and
a back side layer on the continuous back side of the continuous wafer opposite the front side wherein the back side layer has a pattern therein so that portions of the continuous back side of the continuous wafer are exposed through the pattern in the back side layer, wherein the pattern in the back side layer exposes streets between individual integrated circuit devices, and wherein the streets define portions of the continuous wafer separating the integrated circuit devices.
19. An electronic structure comprising:
a continuous wafer including opposing front and back sides wherein the back side of the wafer is continuous;
a plurality of integrated circuit devices on the front side of the continuous wafer; and
a back side layer on the continuous back side of the continuous wafer opposite the front side wherein the back side layer has a pattern therein so that portions of the continuous back side of the continuous wafer are exposed through the pattern in the back side layer, and wherein the pattern in the back side layer is configured to provide directionality of stresses on the continuous back side of the continuous wafer.
20. An electronic structure comprising:
a continuous wafer including opposing front and back sides wherein the back side of the wafer is continuous;
a plurality of integrated circuit devices on the front side of the continuous wafer; and
a back side layer on the continuous back side of the continuous wafer opposite the front side wherein the back side layer has a pattern therein so that portions of the continuous back side of the continuous wafer are exposed through the pattern in the back side layer, and wherein the pattern in the back side layer is configured to provide a modulation of stresses on the continuous back side of the continuous wafer.