Wafer edge inspection and metrology
View Patent ↗Some aspects of the present invention relate to a wafer inspection method. A plurality of images is acquired about an edge portion of a wafer. Each of the images comprises a pixel array having a first dimension and a second dimension. A composite image of compressed pixel arrays is generated by compressing each of the pixel arrays in the first dimension and concatenating the pixel arrays. The composite image is analyzed to identify a wafer feature, for example using a sinusoidal line fit.
1. An edge inspection system comprising:
an edge sensor having an inspection area for acquiring a plurality of images about an edge portion of a wafer;
an image acquisition module for receiving the acquired images, each of the images having a first dimension and a second dimension;
a composite image module for generating a composite image of compressed images, the composite image module comprising:
an image concatenating module for stitching the images; and
an image compression module for compressing the images in the first dimension; and
an image analysis module for analyzing the composite image to evaluate a wafer feature.
2. The system of claim 1 , wherein the image analysis module is adapted to perform a sinusoidal line fitting operation on data related to the composite image to evaluate the wafer feature.
3. The system of claim 1 , further comprising:
a user interface module adapted for displaying the composite image and allowing a user to select a portion of the composite image, wherein upon selection of the portion of the composite image a non-compressed image corresponding to the selected portion of the composite image is displayed to the user.
4. The system of claim 3 , wherein the wafer feature is an edge bead removal line (EBR) line, wherein the image analysis module is adapted to locate the edge bead removal (EBR) line, and further wherein the user interface module is adapted to display a representation of the located edge bead removal (EBR) line at a corresponding location on the non-compressed image.