Phase-change memory device having multiple diodes
View Patent ↗A phase-change memory device with an improved current characteristic is provided. The phase-change memory device includes a metal word line, a semiconductor layer of a first conductivity type being in contact with the metal word line, and an auxiliary diode layer being in contact with metal word line and the semiconductor layer.
1. A phase-change memory device, comprising:
a metal word line;
a semiconductor layer of a first conductivity type being in contact with the metal word line; and
an auxiliary diode layer being in contact with the metal word line and the semiconductor layer,
wherein an interface of the metal word line and the semiconductor layer forms a shottky diode, wherein the shottky diode being directly contact with the auxiliary diode layer in a first direction, wherein the auxiliary diode layer, the semiconductor layer and the metal word line are planar in a second direction which is transverse with the first direction.
2. The phase-change memory device of claim 1 , wherein the auxiliary diode layer is disposed at edges of the semiconductor layer.
3. The phase-change memory device of claim 1 , wherein the auxiliary diode layer has a different work function from the metal word line.
4. The phase-change memory device of claim 1 , wherein the semiconductor layer is disposed on the metal word line.
5. The phase-change memory device of claim 4 , wherein the auxiliary diode layer is disposed on sidewalls of the metal word line and the semiconductor layer to cover edges of an interface between the semiconductor layer and the metal word line.
6. The phase-change memory device of claim 4 , wherein portions of the semiconductor layer are disposed over the auxiliary diode layer.
7. The phase-change memory device of claim 6 , wherein a sidewall of the auxiliary diode layer is aligned with a sidewall of the semiconductor layer.
8. The phase-change memory device of claim 4 , wherein the auxiliary diode layer is disposed on sidewalls of the metal word line.
9. The phase-change memory device of claim 8 , wherein the auxiliary diode layer has a sidewall that is aligned with a sidewall of the semiconductor layer.
10. The phase-change memory device of claim 1 , wherein the metal word line is disposed on the semiconductor layer.
11. The phase-change memory device of claim 10 , wherein the auxiliary diode layer is disposed on sidewalls of the metal word line and on the semiconductor layer to cover exposed portions of the semiconductor layer.
12. The phase-change memory device of claim 10 , wherein the auxiliary diode layer is disposed between the metal word line and the semiconductor layer.
13. The phase-change memory device of claim 12 , wherein the auxiliary diode layer has a sidewall aligned with a sidewall of the semiconductor layer.
14. The phase-change memory device of claim 10 , wherein the auxiliary diode layer is disposed on a sidewall of the metal word line.
15. The phase-change memory device of claim 14 , wherein the word line and the auxiliary diode layer are level with an upper surface of an interlayer insulating layer.
16. The phase-change memory device of claim 1 , wherein the auxiliary diode layer has a second conductivity type opposite to the first conductivity type and is formed within edge areas of the semiconductor layer.
17. A phase-change memory device, comprising:
a semiconductor substrate;
a metal word line formed on the semiconductor substrate;
a polysilicon layer of a first conductivity type being in contact with an upper portion of the metal word line, wherein an interface of the metal word line and the polysilicon layer forms a shottky diode; and
an auxiliary diode layer, disposed on edges of the polysilicon layer to be in directly contact with the metal word line and the polysilicon layer in a first direction, and comprising a conduction layer having a different work function from the metal word line, wherein the auxiliary diode layer, the polysilicon layer and the metal word line are planar in a second direction which is transverse with the first direction.
18. The phase-change memory device of claim 17 , wherein the auxiliary diode layer is disposed on sidewalls of the metal word line and the polysilicon layer to cover side surfaces of an interface between the polysilicon layer and the metal word line.
19. The phase-change memory device of claim 17 , wherein the auxiliary diode layer is disposed between the metal word line and the polysilicon layer.
20. The phase-change memory device of claim 19 , wherein the auxiliary diode layer has a sidewall aligned with a sidewall of the polysilicon layer.
21. The phase-change memory device of claim 17 , wherein the auxiliary diode layer is disposed on a sidewall of the word line.
22. The phase-change memory device of claim 21 , wherein the auxiliary diode layer has a sidewall aligned with a sidewall of the polysilicon layer.