Semiconductor chip arrangement with sensor chip and manufacturing method
View Patent ↗On a carrier ( 1 ) an adhesion layer ( 4 ), an ASIC chip ( 2 ) and a sensor chip ( 3 ) are arranged one above another. An interchip connection ( 5 ) is provided for electrically connecting the chips among one another, and an ASIC connection ( 6 ) is provided for externally electrically connecting the circuit integrated in the ASIC chip.
1. A method for manufacturing a semiconductor chip arrangement, the method comprising
fitting an ASIC chip on a carrier by means of an adhesion layer,
providing an ASIC connection for externally electrically connecting a circuit integrated in the ASIC chip,
arranging a sensor chip above a top side of the ASIC chip, said top side facing away from the carrier, and is permanently connected to the ASIC chip, and
producing an electrical connection between the sensor chip and connection contact areas on the top side of the ASIC chip, wherein the electrical connection is a direct inter-chip connection between the sensor chip and the ASIC chip wherein the electrical connection is formed by solder balls or stud bumps soldered or welded on the connection contact areas of the ASIC chip.
2. The method as claimed in claim 1 , wherein
the electrical connection between the sensor chip and the ASIC chip is produced by means of solder balls.
3. The method as claimed in claim 1 , wherein
the electrical connection between the sensor chip and the ASIC chip is produced by means of stud bumps.
4. The method as claimed in claim 1 , further comprising
arranging the ASIC chip in a cutout in the carrier.
5. The method as claimed in claim 1 , further comprising
covering the sensor chip with a decomposable covering layer and then embedded into a filling, and
removing the covering layer to an extent such that the sensor chip is separated from the filling by an interspace.
6. The method as claimed in claim 1 , further comprising
applying an adhesive layer to the carrier, and
fixing the ASIC chip on the adhesive layer, such that the adhesive layer forms the adhesion layer.
7. The method as claimed in claim 1 , further comprising
applying an adhesive film to the ASIC chip and
fixing the ASIC chip on the carrier by means of the film, such that the film forms the adhesion layer.
8. The method of claim 1 , wherein the sensor chip is arranged above the top side of the ASIC chip by flip-chip mounting.
9. A method for manufacturing a semiconductor chip arrangement, the method comprising
fitting an ASIC chip on a carrier by means of an adhesion layer,
providing an ASIC connection for externally electrically connecting a circuit integrated in the ASIC chip,
arranging a sensor chip above a top side of the ASIC chip, said top side facing away from the carrier, and is permanently connected to the ASIC chip,
producing a direct electrical connection between the sensor chip and the ASIC chip,
covering the sensor chip with a decomposable covering layer and then embedded into a filling, and
removing the covering layer to an extent such that the sensor chip is separated from the filling by an interspace.