IP Library Granted Patent US 8,945,367
Granted Patent B2
US 8,945,367 · App. 13/008,649 · Granted Feb 3, 2015

Electrolytic apparatus, system and method for the safe production of nitrogen trifluoride

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Quick Facts
Patent No.
US 8,945,367
App. No.
13/008,649
Granted
Feb 3, 2015
Kind
B2
Abstract

An electrolytic cell and system used for making nitrogen trifluoride consisting of a computer and an electrolytic cell having a body, an electrolyte, at least one anode chamber that produces an anode product gas, at least one cathode chamber, and one or more fluorine adjustment means to maintain fluorine or hydrogen in the anode product gas within a target amount by adjusting the concentration of fluorine in said anode product gas, and the process that controls the system.

Claims (25)

1. A process of controlling an electrolytic apparatus used for making nitrogen trifluoride comprising a body, an electrolyte, at least one anode chamber that produces an anode product gas, at least one cathode chamber, and one or more fluorine adjustment means to maintain a target excess concentration of fluorine in said anode product gas by adjusting the concentration of fluorine in said anode product gas to react with hydrogen to maintain a concentration of hydrogen below deflagration levels in said anode product gas, wherein said one or more fluorine adjustment means are selected from the group consisting of current, temperature, composition of the electrolyte, and flow of fluorine from an external fluorine gas supply, said process comprising the steps of:

(a) analyzing anode product gas;

(b) determining if hydrogen or fluorine are present within a targeted amount in said anode product gas; and if so going to step (d) below;

(c) adjusting one or more of said fluorine adjustment means to adjust the level of fluorine in said anode product gas; and

(d) repeating steps (a) to (c).

2. The process of claim 1 wherein said one or more fluorine adjustment means are selected from the group of: current applied to the cell if said current will not be outside of a targeted range for said current if said current is adjusted, temperature of the electrolyte if said temperature will not be outside of a targeted range for said temperature if said temperature is adjusted, composition of the electrolyte if said composition will not be outside a targeted range for said composition and the electrolyte composition will stay between the maximum and minimum level for said electrolyte composition if said electrolyte composition is adjusted, and the flow from a fluorine gas supply if said flow rate will not be outside a targeted range for said flow from a fluorine gas supply if it is adjusted.

3. The process of claim 2 further wherein the targeted amount determined in step (b) is from 0.1 to 5 mol % fluorine.

4. The process of claim 1 further wherein the adjusting of one or more of said fluorine adjusting means of step (c) is one or more of the following steps when the amount of fluorine is below or hydrogen is above the targeted concentration as measured in step (b):

adding hydrogen fluoride to the electrolyte; decreasing the amount of ammonia in the electrolyte; lowering the operating temperature; increasing the amount of current applied to the cell; and/or flowing a gas stream of fluorine into the cell or into the anode product gas stream from a fluorine gas supply.

5. The process of claim 1 further wherein the adjusting of one or more of said fluorine adjusting means of step (c) is one or more of the following steps when the amount of fluorine is above the targeted amount as measured in step (b):

reducing the amount of hydrogen fluoride in the electrolyte; increasing the amount of ammonia in the electrolyte; increasing the operating temperature; decreasing the amount of current applied to the cell; and/or reducing or stopping the flow of a fluorine gas into the cell or into the anode product gas stream from a fluorine gas supply.

6. The process of claim 1 further wherein the targeted amount determined in step (b) is from 0.1 to 5 mol % fluorine.

7. The process of claim 1 further wherein the targeted amount determined in step (b) is less than 5 mol % hydrogen.

8. The process of claim 1 wherein the adjusting step (c) further comprises the step of:

(i) measuring the electrolyte composition and adjusting said electrolyte composition if after adjusting said electrolyte composition said electrolyte composition will stay within a targeted amount for the electrolyte composition and within the maximum and minimum levels for the electrolyte in said cell.

9. The process of claim 8 wherein if said electrolyte composition cannot be adjusted, the adjusting step (c) further comprises the step of:

(ii) measuring the temperature of the electrolyte and adjusting the temperature of the electrolyte if said adjusting the temperature of the electrolyte will remain within a targeted temperature range for the electrolyte.

10. The process of claim 9 wherein if said electrolyte composition and said temperature cannot be adjusted, the adjusting step (c) further comprises the step of:

(iii) measuring the current applied to the cell and adjusting the current applied to the cell if adjusting said current will remain within a targeted current range for the cell.

11. The process of claim 10 wherein if said electrolyte composition, said temperature, and said current cannot be adjusted, the adjusting step (c) further comprises the step of:

(iv) signaling an operator.

12. The process of claim 10 wherein if said electrolyte composition, said temperature, and said current cannot be adjusted, the adjusting step (c) further comprises the step of:

(iv) measuring the flow of fluorine into the anode product gas and adjusting the flow of fluorine into the anode product gas.

13. The process of claim 1 , further comprising the step of adding inert gas to said anode product gas if more than 5 mol % of hydrogen is detected in the anode product gas in step (b).

14. The process of claim 1 wherein said fluorine adjusting means are electrolyte composition and temperature.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Oct 7, 2019
From: CITIBANK, N.A., AS AGENT
To: VERSUM MATERIALS US, LLC
Reel/Frame 050647/0001 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 20, 2017
From: AIR PRODUCTS AND CHEMICALS, INC.
To: VERSUM MATERIALS US, LLC
Reel/Frame 041772/0733 →
PATENT SECURITY AGREEMENT Recorded Oct 27, 2016
From: VERSUM MATERIALS US, LLC
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 040503/0442 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Mar 11, 2011
From: HART, JAMES JOSEPH; MACHADO, REINALDO MARIO; WITHERS, HOWARD PAUL, JR.; LO, SAI-HONG A.; CIALKOWSKI, EDWARD JAY; JAMBUNATHAN, KRISHNAKUMAR
To: AIR PRODUCTS AND CHEMICALS, INC.
Reel/Frame 025939/0134 →