Single field zero mask for increased alignment accuracy in field stitching
View Patent ↗A single field photomask includes a first set of targets formed on a first side of the photomask, and a second set of targets formed on a second side of the photomask, opposite the first side. In operation, the photomask is to be applied to a wafer without any alignment marks. The photomask forms a first set of alignment marks in the wafer from the first set of targets, and the photomask further forms a second set of alignment marks in the wafer from the second set of targets. The first set of alignment marks is used to align to a first field mask and the second set of alignment marks is used to align to a second field mask to stitch an image of the first field mask to an image of the second field mask.
1. A set of photomasks for stitching an image of a first field to an image of a second field on a substrate, comprising:
a zero mask comprising a first set of targets formed on a first side of the zero mask and a second set of targets formed on a second side, opposite the first side, of the zero mask, the zero mask to be applied to the substrate having no previous alignment marks formed thereon for the zero mask to align to, the zero mask forming a first set of alignment marks in the substrate from the first set of targets and forming a second set of alignment marks in the substrate from the second set of targets;
a first field mask comprising the image of the first field and configured to align to the first set of alignment marks on the substrate formed by the first set of targets of the zero mask; and
a second field mask comprising the image of the second field and configured to align to the second set of alignment marks on the substrate formed by the second set of targets of the zero mask,
wherein the image of the first field is stitched to the image of the second field on the substrate when the first field mask is aligned to the first set of alignment marks and the second field mask is aligned to the second set of alignment marks.
2. The set of photomasks of claim 1 , wherein the first set of targets and the second set of targets have the same shape.
3. The set of photomasks of claim 1 , wherein the first set of targets and the second set of targets have different shapes.
4. The set of photomasks of claim 1 , wherein the first set of targets and the second set of targets have a shape selected from one of a cross, a diamond, or a chevron.
5. The set of photomasks of claim 1 , wherein the first set of targets has a first number of targets and the second set of targets has a second number of targets, the first number is the same as the second number.
6. The set of photomasks of claim 1 , wherein the first set of targets has a first number of targets and the second set of targets has a second number of targets, the first number is different from the second number.
7. The set of photomasks of claim 1 , wherein the first and second field masks have a field size no greater than a stepper field size and the first and second field masks stitched together to form an area greater than the stepper field size.