Patterned dummy wafers loading in batch type CVD
View Patent ↗A method for semiconductor device fabrication is provided. The present invention is directed towards using at least one patterned dummy wafer along with one or more product wafers in a film deposition system to create a sidewall layer thickness variation that is substantially uniform across all product wafers. The at least one patterned dummy wafer may have a high density patterned substrate surface with a topography that is different from or substantially similar to a topography of the one or more product wafers. Furthermore, in a batch type Chemical Vapor Deposition (CVD) system, the at least one patterned dummy wafer may be placed near a gas inlet of the CVD system. At least one patterned dummy wafer may be placed near an exhaust of the CVD system. Additionally, the patterned dummy wafers may be reusable in subsequent film deposition processes.
1. A method for semiconductor device fabrication, the method comprising:
loading one or more product wafers in a film deposition system, wherein the one or more product wafers includes a patterned substrate surface;
loading a plurality of dummy wafers in the film deposition system, wherein the plurality of dummy wafers are arranged substantially parallel to the one or more product wafers, wherein at east one of the plurality of dummy wafers has a patterned substrate surface different from another patterned substrate surface of at least one other dummy wafer of the plurality of dummy wafers; and
performing a film deposition process to create at least a sidewall layer on the patterned substrate surface of the one or more product wafers.
2. The method of claim 1 , wherein the plurality of dummy wafers are arranged between the one or more product wafers and an inlet of the film deposition system.
3. The method of claim 1 , wherein the plurality of dummy wafers are arranged between the one or more product wafers and an exhaust of the film deposition system.
4. The method of claim 3 , wherein the plurality of dummy wafers are further arranged between the one or more product wafers and an inlet of the film deposition system.
5. The method of claim 1 , further comprising:
reusing one or more of the plurality of dummy wafers in a subsequent film deposition process.
6. The method of claim 5 , further comprising:
reworking one or more of the plurality of dummy wafers to remove a film deposition layer.
7. The method of claim 1 , wherein a patterned substrate surface of one or more of the plurality of dummy wafers comprises non-functional circuitry.
8. The method of claim 1 , wherein the film deposition system further comprises a Chemical Vapor Deposition (CVD) system.
9. The method of claim 1 , wherein the patterned substrate surface of the one or more product wafers comprises a plurality of in fabrication memory cells, wherein the plurality of in fabrication memory cells includes at least one of PRAM, FeRAM, MRAM, EPROM, flash memory, SRAM, or DRAM.
10. The method of claim 1 , wherein a patterned substrate surface of one or more of the plurality of dummy wafers comprises an effective surface area that is at least 1.5 times larger than a two-dimensional flat surface area of one or more of the plurality of dummy wafers, wherein the two-dimensional flat surface area is π 2 , where r is the radius of the one or more of the plurality of dummy wafers.
11. The method of claim 1 , wherein a pattern density of of one or more of the plurality of dummy wafers is different from a pattern density of the one or more product wafers.
12. The method of claim 1 , wherein the patterned substrate surface of the one or more product wafers comprises one or more integrated circuits formed thereon.
13. The method of claim 1 , wherein the patterned substrate surface of the one or more product wafers is arranged in the same relative position as a patterned substrate surface of one or more of the plurality of dummy wafers in the film deposition system.
14. A method for memory fabrication, the method comprising:
loading one or more product wafers in a chemical vapor deposition (CVD) system, wherein the one or more product wafers includes a patterned substrate surface;
loading a plurality of dummy wafers in the CVD system, wherein the plurality of dummy wafers are arranged substantially parallel to the one or more product wafers, wherein at least one of the plurality of dummy wafers has a patterned substrate surface different from another patterned substrate surface of at least one other dummy wafer of the plurality of dummy wafers; and
performing a film deposition process to create at least a sidewall layer on the patterned substrate surface of the one or more product wafers.
15. The method of claim 14 , wherein the plurality of dummy wafers are arranged between the one or more product wafers and an inlet of the CVD system.
16. The method of claim 14 , wherein the plurality of dummy wafers are arranged between the one or more product wafers and an exhaust of the CVD system.
17. The method of claim 16 , wherein the plurality of dummy wafers are arranged between the one or more product wafers and an inlet of the CVD system.
18. The method of claim 14 , further comprising:
reusing one or more of the plurality of dummy wafers in a subsequent film deposition process.
19. A method for memory fabrication, the method comprising:
loading one or more product wafers in a batch type chemical vapor deposition (CVD) system, wherein the one or more product wafers includes a patterned substrate surface with a plurality of core flash memory cells in fabrication with at least one sidewall;
loading a plurality of dummy wafers in the CVD system, wherein the plurality of dummy wafers are arranged substantially parallel to the one or more product wafers, wherein at least one, of the plurality of dummy wafers has a patterned substrate surface different from another patterned substrate surface of at Jog one other dummy wafer of the plurality of dummy wafers; and
performing an oxide spacer deposition process that deposits an oxide spacer on the patterned substrate surface of the one or more product wafers, such that the oxide spacer covers the at least one sidewall of the plurality of core flash memory cells in fabrication.
20. The method of claim 19 , further comprising:
reusing one or more of the plurality of dummy wafers in a subsequent film deposition process.
21. A method for semiconductor device fabrication, comprising:
loading one or more product wafers in a film deposition system that has at least an inlet and an exhaust, wherein the one or more product wafers are arranged between the inlet of the film deposition system and the exhaust of the film deposition system, and wherein the one or more product wafers includes a patterned substrate surface;
loading at least one patterned dummy wafer in the film deposition system, wherein the at least one patterned dummy wafer is arranged between the inlet of the film deposition system and the exhaust of the film deposition system such that the at least one patterned dummy wafer is substantially parallel to the one or more product wafers, and wherein the at least one patterned dummy wafer includes a plurality of patterned dummy wafers, such that a patterned substrate surface of at least one of the plurality of patterned dummy wafers is different from a patterned substrate surface of at least one other patterned dummy wafer of the plurality of patterned dummy wafers; and
performing a film deposition process to create at least a sidewall layer on the patterned substrate surface of the one or more product wafers.