Patterning a gate stack of a non-volatile memory (NVM) with formation of a gate edge diode
View Patent ↗A gate-edge diode is made in a diode region of a substrate and a non-volatile memory cell is made in an NVM region of the substrate. A first dielectric layer is formed on the substrate in the diode region and the NVM region. A first conductive layer is formed on the first dielectric layer. A second dielectric layer is formed on the first conductive layer. A second conductive layer is formed over the second dielectric layer. A first mask is formed over the diode region having a first pattern. The first pattern is of a plurality of fingers and a second mask over the NVM region has a second pattern. The second pattern is of a gate stack of the non-volatile memory cell. An etch is performed through the second conductive layer, the second dielectric layer, and the first conductive layer to leave the first pattern of the plurality of fingers in the diode region and the second pattern of the gate stack in the NVM region. An implant is performed using the gate stack and the plurality of fingers as a mask to provide source/drain regions adjacent to the gate stack in the NVM region and diode terminals between the fingers in the diode region to form the gate-edge diode with the diode terminals and the substrate.
1. A method of making a gate-edge diode in a diode region of a substrate and a non-volatile memory cell in an NVM region of the substrate, comprising:
forming a first dielectric layer on the substrate in the diode region and the NVM region;
forming a first conductive layer on the first dielectric layer;
forming a second dielectric layer on the first conductive layer;
forming a second conductive layer over the second dielectric layer;
forming a first mask over the diode region having a first pattern, wherein the first pattern is of a plurality of fingers and a second mask over the NVM region having a second pattern, wherein the second pattern is of a gate stack of the non-volatile memory cell;
performing an etch through the second conductive layer, the second dielectric layer, and the first conductive layer to leave the first pattern of the plurality of fingers in the diode region and the second pattern of the gate stack in the NVM region; and
performing an implant using the gate stack and the plurality of fingers as a mask to provide source/drain regions adjacent to the gate stack in the NVM region and diode terminals between the fingers in the diode region to form the gate-edge diode with the diode terminals and the substrate.
2. The method of claim 1 , wherein the step of forming the first mask is further characterized by the first pattern being further of a connecting bar connecting the plurality of fingers and the step of performing the etch leaves the connecting bar.
3. The method of claim 2 , further comprising removing the second conductive layer from the connecting bar and leave connecting bar as a portion of the first conductive layer.
4. The method of claim 1 , wherein the gate stack comprises a control gate as a portion of the second conductive layer and a floating gate as a portion of the first conductive layer.
5. The method of claim 1 , further comprising forming sidewall spacers adjacent to the plurality of fingers and the gate stack.
6. The method of claim 5 , wherein the step of performing the implant is further characterized by the sidewalls spacers acting as a mask.
7. The method of claim 1 , further comprising removing the first dielectric layer between the fingers and adjacent to the gate stack after the step of performing the implant.
8. The method of claim 1 , further comprising forming a contact to the first conductive layer.
9. The method of claim 1 , further comprising forming an interlayer dielectric over the gate stack and the plurality of fingers.
10. The method of claim 9 , further comprising forming contacts through the interlayer dielectric to the diode terminals.
11. A method of making a gate-edge diode in a diode region of a substrate and a non-volatile memory cell in an NVM region of the substrate, comprising:
forming a first dielectric layer on the substrate in the diode region and the NVM region;
forming a first conductive layer on the first dielectric layer;
forming a second dielectric layer on the first conductive layer;
forming a second conductive layer over the second dielectric layer;
forming a first mask over the diode region having a first pattern, wherein the first pattern is of a plurality of fingers and a second mask over the NVM region having a second pattern, wherein the second pattern is of a gate stack of non-volatile memory cell;
performing an etch through the second conductive layer, the second dielectric layer, and the first conductive layer to leave the first pattern of the plurality of fingers in the diode region and the second pattern of the gate stack in the NVM region;
forming sidewall spacers adjacent to the plurality of fingers and the gate stack; and
performing an implant using the gate stack, the plurality of fingers, and the sidewall spacers as a mask to provide source/drain regions adjacent to the gate stack in the NVM region and diode terminals between the fingers in the diode region to form the gate-edge diode with the diode terminals and the substrate.
12. The method of claim 11 , wherein the step of forming the first mask is further characterized by the first pattern being further of a connecting bar connecting the plurality of fingers and the step of performing the etch leaves the connecting bar.
13. The method of claim 12 , further comprising removing the second conductive layer from the connecting bar and leave connecting bar as a portion of the first conductive layer.
14. The method of claim 13 , wherein the gate stack comprises a control gate as a portion of the second conductive layer and a floating gate as a portion of the first conductive layer.
15. The method of claim 14 , further comprising removing the first dielectric layer between the fingers and adjacent to the gate stack after the step of performing the implant.
16. A method of making a gate-edge diode in a diode region of a substrate and a non-volatile memory cell in an NVM region of the substrate, comprising:
forming a first dielectric layer on the substrate in the diode region and the NVM region;
forming a polysilicon layer on the first dielectric layer;
forming a second dielectric layer on the polysilicon layer;
forming a conductive layer over the second dielectric layer;
forming a first mask over the diode region having a first pattern, wherein the first pattern is of a plurality of fingers and a second mask over the NVM region having a second pattern, wherein the second pattern is of a gate stack of the non-volatile memory cell;
performing an etch through the conductive layer, the second dielectric layer, and the polysilicon layer to leave the first pattern of the plurality of fingers in the diode region and the second pattern of the gate stack in the NVM region; and
performing an implant using the gate stack and the plurality of fingers as a mask to provide source/drain regions adjacent to the gate stack in the NVM region and diode terminals between the fingers in the diode region to form the gate-edge diode with the diode terminals and the substrate.
17. The method of claim 16 , further comprising forming sidewall spacers adjacent to the plurality of fingers and the gate stack, wherein the step of performing the implant is further characterized by the sidewalls spacers acting as a mask.
18. The method of claim 17 , further comprising removing the first dielectric layer between the fingers and adjacent to the gate stack after the step of performing the implant.
19. The method of claim 18 , further comprising performing a patterned etch of the polysilicon layer prior to the step of forming the conductive layer.
20. The method of claim 19 , further comprising:
forming an interlayer dielectric over the gate stack and the plurality of fingers; and
forming contacts through the interlayer dielectric to the diode terminals.