Power MOSFET with a gate structure of different material
View Patent ↗A semiconductor device includes a semiconductor layer of a first conductivity type and a first doping concentration. A first semiconductor region, used as drain, of the first conductivity type has a lower doping concentration than the semiconductor layer and is over the semiconductor layer. A gate dielectric is over the first semiconductor region. A gate electrode over the gate dielectric has a metal-containing center portion and first and second silicon portions on opposite sides of the center portion. A second semiconductor region, used as a channel, of the second conductivity type has a first portion under the first silicon portion and the gate dielectric. A third semiconductor region, used as a source, of the first conductivity type is laterally adjacent to the first portion of the second semiconductor region. The metal-containing center portion, replacing silicon, increases the source to drain breakdown voltage.
1. A method of forming a semiconductor device using a first semiconductor layer having a first conductivity type and a first doping concentration with an overlying second semiconductor layer having the first conductivity type and a second doping concentration less than the first doping concentration, comprising:
forming a gate dielectric over the second semiconductor layer, a portion of the second semiconductor layer to function as a drain;
forming a gate electrode over the gate dielectric, wherein the gate electrode comprises a center portion that comprises metal on the gate dielectric, a first silicon portion on the gate dielectric laterally adjacent to a first side of the center portion, and a second silicon portion on the gate dielectric laterally adjacent to a second side of the center portion in which the first side is opposite the second side;
forming a first semiconductor region in the second semiconductor layer of a second conductivity type having a portion under the first silicon portion to function as a channel, wherein the forming the first semiconductor region includes implanting; and
forming a second semiconductor region of the first conductivity type having a portion to function as a source adjacent to the portion of the first semiconductor region, wherein the forming a second semiconductor region includes implanting.
2. The method of claim 1 , wherein the step of forming the gate electrode comprises:
depositing a polysilicon layer over the gate dielectric;
etching an opening in the polysilicon layer; and
depositing a silicide in the opening to form the center portion of the gate electrode.
3. The method of claim 1 , wherein the step of forming the gate electrode comprises:
depositing a polysilicon layer over the gate dielectric;
forming a masking layer over the polysilicon layer;
forming an opening in the masking layer to expose a portion of the polysilicon layer; and
applying a metal to the opening to form a silicide as the center portion of the gate electrode.
4. The method of claim 1 , wherein the step of forming the gate electrode comprises:
depositing a polysilicon layer over the gate dielectric;
etching an opening in the polysilicon layer; and
forming a silicide in the opening to form the center portion of the gate electrode.
5. The method of claim 3 , wherein the silicide comprises tungsten silicide.
6. The method of claim 3 wherein the metal comprises tungsten.
7. The method of claim 1 further comprising:
forming a third semiconductor region in the second semiconductor layer of a second conductivity type having a portion under the second silicon portion to function as a channel, wherein the forming the third semiconductor region includes implanting; and
forming a fourth semiconductor region of the first conductivity type having a portion to function as a source adjacent to the portion of the third semiconductor region, wherein the forming a fourth semiconductor region includes implanting.
8. The method of claim 7 wherein:
the implanting included in the forming the third semiconductor region is performed concurrently with the implanting in the forming the first semiconductor region;
the implanting included in the forming the fourth semiconductor region is performed concurrently with the implanting in the forming the second semiconductor region.
9. The method of claim 1 wherein the implanting included in the forming the first semiconductor region includes implanting into a first implanted region of the second semiconductor layer, wherein the implanting included in forming the second semiconductor region includes implanting into a selected portion the first implanted region.
10. The method of claim 9 wherein the selected portion of the first implanted region has a depth that is less than a depth of the first implanted region.
11. The method of claim 1 further comprising:
forming a fifth semiconductor region in the first implanted region, the fifth semiconductor region being of the second conductivity type and adjacent to the second semiconductor region.
12. The method of claim 11 further comprising:
forming a silicide on a portion of the second semiconductor region and on the fifth semiconductor region.
13. The method of claim 3 wherein the step of forming the gate electrode further comprises:
patterning after the applying the metal, the layer of polysilicon layer to form the first silicon portion and the second silicon portion.
14. The method of claim 1 , wherein the step of forming the gate electrode comprises:
forming a polysilicon layer over the gate dielectric;
forming a metal after the depositing a polysilicon layer.
15. The method of claim 14 wherein the step of forming the gate electrode further comprises forming a silicide using the metal.
16. The method of claim 15 wherein the step of forming the gate electrode further comprises:
patterning after forming the silicide, the layer of polysilicon layer to form the first silicon portion and the second silicon portion.
17. The method of claim 15 wherein the patterning includes patterning the silicide.
18. The method of claim 1 wherein the step of forming the gate electrode comprises:
depositing a polysilicon layer over the gate dielectric;
forming a layer of gate material after the depositing a polysilicon layer;
patterning the layer of gate material and the polysilicon layer, wherein the first silicon portion and the second silicon portion are formed from the polysilicon layer and the patterned layer of gate material is located over the first silicon portion and the second silicon portion.
19. A method of forming a semiconductor device, comprising:
forming a gate dielectric over semiconductor material, the semiconductor material being of a first conductivity type, a portion of semiconductor material to function as a drain;
forming a gate electrode over the gate dielectric, wherein the gate electrode comprises a center portion that comprises metal on the gate dielectric, a first silicon portion on the gate dielectric laterally adjacent to a first side of the center portion, and a second silicon portion on the gate dielectric laterally adjacent to a second side of the center portion in which the first side is opposite the second side;
forming a first semiconductor region in the semiconductor material of a second conductivity type having a portion under the first silicon portion to function as a channel;
forming a second semiconductor region in the semiconductor material of a second conductivity type having a portion under the second silicon portion to function as a channel; and
forming a third semiconductor region of the first conductivity type having a portion to function as a source adjacent to the portion of the first semiconductor region;
forming a fourth semiconductor region of the first conductivity type having a portion to function as a source adjacent to the portion of the second semiconductor region.
20. The method of claim 19 , wherein the step of forming the gate electrode comprises:
depositing a polysilicon layer over the gate dielectric;
forming a masking layer over the polysilicon layer;
forming an opening in the masking layer to expose a portion of the polysilicon layer; and
applying a metal to the opening to form a silicide as the center portion of the gate electrode.