Method of reducing contamination by providing a removable polymer protection film during microstructure processing
View Patent ↗By providing a protective layer in an intermediate manufacturing stage, an increased surface protection with respect to particle contamination and surface corrosion may be achieved. In some illustrative embodiments, the protective layer may be used during an electrical test procedure, in which respective contact portions are contacted through the protective layer, thereby significantly reducing particle contamination during a respective measurement process.
1. A method, comprising:
performing a first manufacturing process on a substrate comprising a plurality of microstructure devices;
determining an evaluation value for at least one of an expected waiting time of said substrate for a second manufacturing process and an expected defect rate; and
forming a protective layer above said substrate when said determined evaluation value exceeds a predetermined threshold.
2. The method of claim 1 , wherein said second manufacturing process represents an electrical wafer test process.
3. The method of claim 1 , wherein forming said protective layer comprises forming a polymer material so as to cover at least a front surface of said substrate.
4. The method of claim 1 , further comprising removing said protective layer prior to said second manufacturing process.
5. The method of claim 1 , wherein forming said protective layer comprises performing a deposition process.
6. The method of claim 1 , wherein forming said protective layer comprises protecting at least some of said plurality of microstructure devices from particle defects created during said second manufacturing process.
7. The method of claim 1 , wherein said plurality of microstructure devices comprise exposed metal surfaces during said first manufacturing process.
8. The method of claim 1 , wherein said expected waiting time comprises an amount of time that at least some of said plurality of microstructure devices are exposed to an ambient atmosphere.
9. The method of claim 4 , wherein removing said protective layer comprises mechanically drawing off said protective layer from said substrate.
10. The method of claim 4 , wherein said first manufacturing process creates particle defects on at least some of said microstructure devices.
11. The method of claim 9 , wherein mechanically drawing off said protective layer comprises lifting at least a portion of said protective layer from a surface of said substrate by grasping said protective layer with a vacuum gripper tool or by grasping at least one handle coupled to said protective layer.
12. The method of claim 10 , wherein performing said first manufacturing process comprises performing a chemical mechanical polishing process.
13. The method of claim 10 , wherein removing said protective layer comprises removing at least some of said particle defects created during said first manufacturing process.
14. The method of claim 6 , further comprising removing said protective layer from above said substrate, wherein removing said protective layer comprises removing at least some of said particle defects.
15. The method of claim 7 , wherein forming said protective layer comprises preventing corrosion of at least some of said exposed metal surfaces.