Micro-optical device packaging system
View Patent ↗According to one embodiment, a micro-optical device includes an electro-optical circuit and an annular frame disposed on a surface of a substrate. The electro-optical circuit has an active region that is encapsulated by a window and an interconnect region adjacent at least one edge of the electro-optical circuit. The annular frame extends around an outer periphery of the window and is separated from the window by a gap, the annular frame and the electro-optical circuit form a cavity for placement of a plurality of bonding wires the interconnect that electro-optical circuit to the substrate.
1. A micro-optical device comprising:
a substrate;
an electro-optical device supported by the substrate;
an electrical connection between the substrate and the electro-optical device; and
a frame attached to the substrate and forming a cavity around the electrical connection, wherein the frame extends towards the electro-optical device above the cavity in a lip region, and wherein the frame is separated from the electro-optical device in the lip region by a gap.
2. The device of claim 1 , wherein the substrate is ceramic.
3. The device of claim 1 , wherein the frame is plastic.
4. The device of claim 1 , wherein the electrical connection is one or more bond wires.
5. The device of claim 1 , wherein the frame has alignment features formed therein.
6. The device of claim 1 , wherein the electro-optical device comprises a micro-optical-electromechanical system.
7. The device of claim 1 , wherein the electro-optical device comprises a charge coupled device.
8. The device of claim 1 , wherein the electro-optical device comprises a light modulator.
9. The device of claim 1 , wherein the electro-optical device comprises a micromirror device.
10. The device of claim 1 , wherein the electro-optical device comprises a window having a surface opposite the substrate at a first distance relative to a surface of the substrate, wherein a surface of the frame has a second distance relative to the surface of the substrate and the first distance is less than the second distance.
11. The device of claim 1 , wherein the electro-optical device comprises a window having a surface opposite the substrate at a first distance relative to a surface of the substrate, wherein a surface of the frame has a second distance relative to the surface of the substrate and the first distance is greater than the second distance.
12. The device of claim 1 , wherein the electro-optical device comprises a window having a surface opposite the substrate at a first distance relative to a surface of the substrate, wherein a surface of the frame has a second distance relative to the surface of the substrate and the first distance is approximately the same as the second distance.
13. The device of claim 1 , wherein the frame is separated from the electro-optical device in the lip region by a gap approximately 180 microns wide.
14. The device of claim 1 , wherein the frame is separated from the electro-optical device in the lip region by a gap 1000 microns, or less, wide.
15. The device of claim 1 , comprising a potting material in at least a portion of the cavity region.
16. The device of claim 1 , comprising an epoxy material in at least a portion of the cavity region.
17. The device of claim 1 , comprising a lens housing engaging the frame.