Metal foil with electric resistance film and method of producing the same
View Patent ↗A copper foil with an electric resistance film in which a film with higher electrical resistivity than the metal foil is provided on the metal foil, wherein a plurality of electric resistance films with different electric resistance is arranged in parallel on the same metal foil. With conventionally used built-in resistor elements, one resistor element is configured of one type of substance on the copper foil. Nevertheless, when actually mounting the resistor elements, the circuit design tolerance can be increased and the number of man-hours can be reduced with two resistor elements and further with a plurality of resistor elements compared to a case with one resistor element. This invention aims to provide a metal foil with a built-in resistor element comprising two or more types of resistor elements on one metal foil.
1. A metal foil with an electric resistance film in which a film with higher electric resistance than the metal foil is provided on the metal foil, wherein a plurality of electric resistance films with different electric resistance is mounted in a direction that transects a length direction of the metal foil.
2. The metal foil with an electric resistance film according to claim 1 , wherein each of said electric resistance films of said plurality of electric resistance films is shaped substantially the same and is respectively configured from a resistor element of different electric resistance.
3. The metal foil with an electric resistance film according to claim 2 , wherein the metal foil is a copper or copper alloy foil.
4. The metal foil with an electric resistance film according to claim 1 , wherein said plurality of electric resistance films is configured from a combination of resistor elements of different cross-sectional shape.
5. The metal foil with an electric resistance film according to claim 4 , wherein the metal foil is a copper or copper alloy foil.
6. The metal foil with an electric resistance film according to claim 1 , wherein the plurality of electric resistance films is configured from a combination of a resistor element having different electrical resistivity and a resistor element of a different cross-sectional shape.
7. The metal foil with an electric resistance film according to claim 1 , wherein metal of the metal foil is copper or copper alloy.
8. The metal foil with an electric resistance film according to claim 6 , wherein the metal foil is a copper or copper alloy foil.
9. A method of producing a metal foil with an electric resistance film, comprising the steps of disposing a cathode made of an electric resistance material in a vacuum device, sputtering the cathode as the target while carrying the metal foil in a manner of facing the cathode, and depositing a target material on the metal foil, wherein a plurality of electric resistance films with different electric resistance is deposited on the same metal foil by arranging a shutter between the target and the metal foil and controlling film thickness with the shutter.
10. The method of producing a metal foil with an electric resistance film according to claim 9 , wherein the metal foil is a copper foil or a copper alloy foil.