Thin film comprising titanium oxide as main component and sintered compact sputtering target comprising titanium oxide as main component
View Patent ↗A thin film comprising titanium oxide as its main component, wherein the thin film includes titanium, oxygen and copper, content of Ti is 29.0 at % or higher and 34.0 at % or less and content of Cu is 0.003 at % or higher and 7.7 at % or less with remainder being oxygen and unavoidable impurities, and ratio of oxygen component to metal components, O/(2Ti+0.5Cu), is 0.96 or higher. This invention aims to obtain a thin film comprising titanium oxide as its main component with a high refractive index and low extinction coefficient and a sintered compact sputtering target comprising titanium oxide as its main component which is suitable for producing the foregoing thin film, to obtain a thin film with superior transmittance and low reflectance and which is effective as an interference film or protective film of an optical information recording medium, and to obtain a thin film that can be applied to a glass substrate; that is, a thin film that can be used as a heat ray reflective film, antireflection film, and interference filter.
1. An optical interference film or a protective film of an optical information recording medium which is formed by performing DC sputtering to a target comprising titanium oxide as its main component, wherein the film includes titanium, oxygen and copper, content of Ti is 29.0% or higher and 34.0 at % or less and content of Cu is 0.003 at % or higher and 7.7 at % or less with the remainder being oxygen and unavoidable impurities, and ratio of oxygen component to metal components, O/(2Ti+0.5Cu), is 0.96 or higher, and wherein a refractive index of the film in a wavelength region of 400 to 410 nm is 2.60 or higher.
2. The film according to claim 1 , wherein an extinction coefficient of the film in a wavelength region of 400 to 410 nm is 0.1 or less.
3. The film according to claim 2 , wherein the extinction coefficient in the wavelength region of 400 to 410 nm is 0.05 or less.
4. The film according to claim 1 , wherein the film is amorphous.
5. A sintered compact target for DC sputtering for forming an optical interference film or a protective film of an optical information recording medium comprising titanium oxide as its main component, wherein the target includes copper and comprises, as its main component, titanium oxide made of titanium, oxygen and unavoidable impurities as a remainder thereof, the respective components have a composition ratio of (TiO 2-m ) 1-n Cu n provided that 0≦m≦0.5 and 0.0001≦n≦0.2, and the target has a specific resistance of 100 Ω/cm or less.
6. An optical interference or protective film of an optical information recording medium, comprising:
an amorphous film having titanium oxide as its main component;
the amorphous film including titanium, oxygen and copper with a content of Ti being 29.0% to 34.0 at %, a content of Cu being 0.003 at % to 7.7 at %, and a remainder being oxygen and unavoidable impurities; and
the amorphous film having a ratio of oxygen component to metal components, O/(2Ti+0.5Cu), of 0.96 or higher.
7. The optical interference or protective film according to claim 6 , wherein a refractive index of the amorphous film in a wavelength region of 400 to 410 nm is 2.60 or higher.
8. The optical interference or protective film according to claim 7 , wherein an extinction coefficient of the amorphous film in a wavelength region of 400 to 410 nm is 0.1 or less.
9. The optical interference or protective film according to claim 7 , wherein an extinction coefficient of the amorphous film in a wavelength region of 400 to 410 nm is 0.05 or less.