Multidentate ketoimine ligands for metal complexes

1. A compound having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5-6 are individually selected from the group consisting of C 1-2 alkyl; L is a neutral ligand coordinated to the metal via an oxygen or nitrogen atom; n is 0 or 1; X and Z are independently selected from O or N; when X is N, m is 2 and the two R 5 are each independently selected from the group consisting of C 1-2 alkyl; when X is O, m is 1 and R 5 is selected from the group consisting of C 1-2 alkyl; q can be 0 or 1; when q is 0, Z and R 6 are not present; when q is 1, Z is either N, p is 2 and the two R 6 are each independently selected from the group consisting of C 1-2 alkyl; or Z is O, p is 1 and R 6 is selected from the group consisting of C 1-2 alkyl; when q is 0, n must be 1; when X is N and Z is O and q is 1, n must be 1.

2. The compound of claim 1 having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, and barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5-6 are individually selected from the group consisting of C 1-2 alkyl; L is a neutral ligand coordinated to the metal via an oxygen or nitrogen atom.

3. The compound of claim 1 having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, and barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, and a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5 is selected from the group consisting of C 1-2 alkyl; L is a neutral ligand coordinated to the metal via an oxygen or nitrogen atom.

4. The compound of claim 1 having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, and barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, and a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5-6 are individually selected from the group consisting of C 1-2 alkyl, R is selected from the group consisting of C 1-2 alkyl; L is a neutral ligand coordinated to the metal via an oxygen or nitrogen atom.

5. The compound of claim 1 having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, and barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, and a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5-6 are individually selected from the group consisting of C 1-2 alkyl, R and R are individually selected from the group consisting of C 1-2 alkyl.

6. The compound of claim 1 having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, and barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, and a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5 is selected from the group consisting of C 1-2 alkyl, R is selected from the group consisting of C 1-2 alkyl.

7. The compound of claim 1 having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, and barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, and a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5 is selected from the group consisting of C 1-2 alkyl, R and R are individually selected from the group consisting of C 1-2 alkyl.

8. The compound of claim 1 having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, and barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, and a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5-6 are individually selected from the group consisting of C 1-2 alkyl, R and R are individually selected from the group consisting of C 1-2 alkyl; L is a neutral ligand coordinated to the metal via an oxygen or nitrogen atom.

9. The compound of claim 1 having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, and barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, and a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5 is selected from the group consisting of C 1-2 alkyl, R is selected from the group consisting of C 1-2 alkyl; L is a neutral ligand coordinated to the metal via an oxygen or nitrogen atom.

10. The compound of claim 1 having the formula:

wherein M is selected from the group consisting of magnesium, calcium, strontium, and barium; wherein R 1 is selected from the group consisting of branched alkyl, fluoroalkyl, cycloaliphatic, and a C 6 aryl and a C 10 aryl; R 2 is selected from the group consisting of hydrogen, alkyl, alkoxy, cycloaliphatic, and aryl; R 3 is linear or branched selected from the group consisting of alkyl, fluoroalkyl, cycloaliphatic, and aryl; R 4 is a linear or branched alkyl bridge having 2 to 10 carbon atoms; R 5 is selected from the group consisting of C 1-2 alkyl, R and R are individually selected from the group consisting of C 1-2 alkyl; L is a neutral ligand coordinated to the metal via an oxygen or nitrogen atom.

11. The compound of claim 1 wherein the neutral ligand is selected from the group consisting of ether, amines, organic amides, and ketones.

12. A composition comprising the compound of claim 1 dissolved in a solvent selected from the group consisting of glyme solvents having from 1 to 20 ethoxy —(C 2 H 4 O)— repeat units; C 2 -C 12 alkanols, organic ethers selected from the group consisting of dialkyl ethers comprising C 1 -C 6 alkyl moieties, C 4 -C 8 cyclic ethers; C 12 -C 60 crown O 4 -O 20 ethers wherein the prefixed C i range is the number i of carbon atoms in the ether compound and the suffixed O i range is the number i of oxygen atoms in the ether compound; C 6 -C 12 aliphatic hydrocarbons; C 6 -C 18 aromatic hydrocarbons; organic esters; organic amines; polyamines and organic amides.

13. A vapor deposition process for forming a conformal metal oxide thin film on a substrate, wherein the metal is selected from the group consisting of magnesium, calcium, strontium and barium the process comprising: introducing a precursor source and an oxygen containing agent into a deposition chamber to deposit the metal oxide film on the substrate, the improvement which comprises using the compound of claim 1 as said precursor source.

14. A vapor deposition process for forming a conformal metal oxide thin film on a substrate, wherein the metal is selected from the group consisting of magnesium, calcium, strontium and barium the process comprising: introducing a precursor source and an oxygen containing agent into a deposition chamber to deposit the metal oxide film on the substrate, the improvement which comprises using the composition of claim 12 as said precursor source.