Method for producing chip packages, and chip package produced in this way
View Patent ↗A method for producing chip packages is disclosed. In one embodiment, a plurality of chips is provided. The chips each have first pads. Second connection pads are applied on the wafer, wherein each second pad is electrically connected to a first pad.
1. A chip package comprising:
an embedded semiconductor chip;
wherein the semiconductor chip has first connection pads which are electrically connected to second connection pads on a dielectric layer above the semiconductor chip;
wherein the electrical connections between the first connection pads and the second connection pads are realized in the wafer assemblage; and
wherein a pitch of the second connection pads is greater than a pitch of the first connection pads;
wherein a layer composed of dielectric lies above the second connection pads and has vias through which metal lines running above the dielectric are electrically connected to the second connection pads, and wherein the area of a second connection pad extends both beyond the area of the via and beyond the area of the metal line in the contact region with the via;
wherein the width of the via amounts to 30% to 70% of the width of the second connection pad; and
wherein the width of the metal line in the contact region amounts to 130% to 200% of the width of the second connection pad.
2. The chip package of claim 1 , comprising wherein the second connection pads and also the electrical connections between the first connection pads and the second connection pads are realized using thin-film process technology.
3. The chip package of claim 1 , comprising wherein third connection pads are applied on the mould compound, the third connection pads being electrically connected to the second connection pads.
4. The chip package of claim 1 , comprising wherein a layer composed of dielectric lies above the second connection pads and has vias through which metal lines running above the dielectric are electrically connected to the second connection pads, wherein the area of the metal line in the contact region with the via extends beyond the area of the second connection pad and the area of the via is essentially congruent with the area of the second connection pad.
5. The chip package of claim 1 , comprising wherein the second connection pads are in each case wider than the first connection pads.
6. The chip package of claim 1 , comprising wherein the second connection pads are distributed over the whole area over the chip area.
7. The chip package of claim 1 , comprising wherein the chip package is a fan-out wafer level package.
8. A chip package comprising:
an embedded semiconductor chip;
wherein the semiconductor chip has first connection pads which are electrically connected to second connection pads on a dielectric layer above the semiconductor chip;
wherein the electrical connections between the first connection pads and the second connection pads are realized in the wafer assemblage;
wherein a layer composed of dielectric lies above the second connection pads and has vias through which metal lines running above the dielectric are electrically connected to the second connection pads;
wherein the area of a second connection pad extends both beyond the area of the via and beyond the area of the metal line in the contact region with the via;
wherein the width of the via amounts to 30% to 70% of the width of the second connection pad; and
wherein the width of the metal line in the contact region amounts to 130% to 200% of the width of the second connection pad.
9. A chip package comprising:
a semiconductor chip accommodated in a mould compound, wherein the semiconductor chip has first connection pads which are electrically connected to second connection pads on a dielectric layer above the semiconductor chips; and
the electrical connections between the first connection pads and the second connection pads realized in a wafer assemblage;
wherein a layer composed of dielectric lies above the second connection pads and has vias through which metal lines running above the dielectric are electrically connected to the second connection pads wherein the area of the metal line in the contact region with the via extends beyond the area of the second connection pad and the area of the via is essentially congruent with the area of the second connection pad; and
wherein the width of the metal line in the contact region amounts to 130% to 200% of the width of the second connection pad.