Semiconductor die assemblies, semiconductor devices including same, and methods of fabrication
Methods of fabricating multi-die assemblies including a base semiconductor die bearing a peripherally encapsulated stack of semiconductor dice of lesser lateral dimensions, the dice vertically connected by conductive elements between the dice, resulting assemblies, and semiconductor devices comprising such assemblies.
1. A semiconductor die assembly, comprising:
a base semiconductor die having conductive elements protruding from a surface;
a single stack of semiconductor dice of common lateral dimensions and of lesser lateral dimensions than lateral dimensions of the base semiconductor die on an opposing surface of the base semiconductor die, an uppermost die of the single stack having an active surface facing the base semiconductor die and having no conductive through vias;
at least partially exposed ends of conductive through vias on the surface of the base semiconductor die;
conductive elements aligned with conductive through vias of semiconductor dice of the assembly vertically connecting all of the semiconductor dice of the assembly, aligned with and the at least partially exposed conductive through via ends on the surface of the base semiconductor die and operably coupling semiconductor dice of the single stack to the base semiconductor die;
a non-conductive material located around the conductive elements and between adjacent semiconductor dice of the assembly and substantially filling spaces between adjacent semiconductor dice of the assembly, between a lowermost semiconductor die of the single stack and the base semiconductor die and extending to a lateral periphery of the single stack of semiconductor dice;
an encapsulant material different from the non-conductive material extending peripherally about the semiconductor dice of common lateral dimensions, in physical contact with the opposing surface of the base semiconductor die and in only peripheral physical contact with the semiconductor dice of the single stack and with the non-conductive material;
a carrier substrate comprising external connections on a surface;
one of a logic die and a system on a chip die mounted to an opposing surface of the carrier substrate, operably coupled to the external connections of the carrier substrate, and to the base semiconductor die through the conductive elements protruding therefrom; and
another encapsulant material in physical contact with an uppermost surface of the uppermost semiconductor die of the single stack, in physical contact with sides of the encapsulant material and sides of the base semiconductor die, a portion of an opposing surface of the base semiconductor die, sides of the one of the logic die and the system on a chip die, and a portion of the opposing surface of the carrier substrate surrounding the one of the logic die and the system on a chip die.
2. A semiconductor device, comprising:
a carrier substrate comprising external connections on a surface;
one of a logic die and a system on a chip die mounted on an opposing surface of the carrier substrate and operably coupled to the external connections; and
an assembly mounted to the one of the logic die and the system on a chip die, the assembly comprising:
a base semiconductor die of greater lateral dimensions than the one of the logic die and the system on a chip die and having discrete conductive elements protruding from and perpendicular to a surface connecting the base semiconductor die to the one of the logic die and the system on a chip die;
a single stack of semiconductor dice of same lateral dimensions less than lateral dimensions of the base semiconductor die on an opposing surface of the base semiconductor die, an uppermost die of the single stack having an active surface facing the base semiconductor die and having no conductive through vias;
discrete conductive elements extending vertically between all of the semiconductor dice of the assembly, aligned with conductive through vias of the semiconductor dice and connecting semiconductor dice of the assembly;
a dielectric material surrounding the conductive elements between adjacent semiconductor dice and filling volumes therebetween to proximate a lateral periphery of the single stack;
an encapsulant material extending peripherally about the single stack of semiconductor dice in only peripheral direct contact with the semiconductor dice of the single stack and with the dielectric material and in direct contact with only the opposing surface of the base semiconductor die; and
another encapsulant material in direct contact with an uppermost surface of the uppermost semiconductor die of the single stack, with the opposing surface of the carrier substrate, and with sides of the one of the logic die and the system on a chip die and extending peripherally about the encapsulant material and the base semiconductor die.
3. A semiconductor die assembly, comprising:
one of a logic die and a system on a chip die disposed over a carrier substrate;
a base semiconductor die having conductive elements protruding from a surface connected to the one of the logic die and the system on a chip die;
a single stack of semiconductor dice of common lateral dimensions and of lesser lateral dimensions than lateral dimensions of the base semiconductor die on an opposing surface of the base semiconductor die, an uppermost die of the single stack having an active surface facing the base semiconductor die;
at least partially exposed ends of conductive through vias on the surface of the base semiconductor die;
conductive elements aligned with conductive through vias of semiconductor dice of the assembly vertically connecting all of the semiconductor dice of the assembly, aligned with the at least partially exposed conductive through via ends on the surface of the base semiconductor die and operably coupling semiconductor dice of the single stack to the base semiconductor die;
a non-conductive material located around the conductive elements and between adjacent semiconductor dice of the assembly and substantially filling spaces between adjacent semiconductor dice of the assembly, between a lowermost semiconductor die of the single stack and the base semiconductor die and extending to a lateral periphery of the single stack of semiconductor dice;
an encapsulant material different from the non-conductive material extending peripherally about the semiconductor dice of common lateral dimensions, in direct contact with the opposing surface of the base semiconductor die and in only peripheral direct contact with the semiconductor dice of the single stack and with the non-conductive material;
and
another encapsulant material in direct contact with an uppermost surface of the uppermost die of the single stack, with at least a portion of the carrier substrate, and with sides of the one of the logic die and the system on a chip die and extending peripherally about the encapsulant material and the base semiconductor die.
4. The semiconductor die assembly of claim 1 , wherein all of the semiconductor dice of the stack have active surfaces thereof facing in a common direction.
5. The semiconductor die assembly of claim 1 , wherein all of the semiconductor dice of the assembly are known good die.
6. The semiconductor die assembly of claim 1 , wherein the base semiconductor dice and the semiconductor dice of the single stack each comprise a memory die.
7. The semiconductor die assembly of claim 1 , wherein the base semiconductor die comprises a logic controller die and the semiconductor dice of the single stack each comprise a memory die.
8. The semiconductor device of claim 2 , wherein active surfaces of all of the semiconductor dice of the single stack face in a common direction.
9. The semiconductor device of claim 2 , wherein all of the semiconductor dice of the assembly are known good die.
10. The semiconductor device of claim 2 , wherein the semiconductor dice of the assembly each comprise a memory die.
11. The semiconductor device of claim 2 , wherein the uppermost die of the single stack on the base semiconductor die is of a lesser thickness than other semiconductor dice of the single stack.
12. The semiconductor die assembly of claim 1 , wherein the uppermost die of the single stack is of a lesser thickness than other semiconductor dice of the single stack.
13. The semiconductor die assembly of claim 1 , further comprising:
circuit traces on the surface of the base semiconductor die extending to pads separately located with respect to the conductive elements protruding from the base semiconductor die for testing the semiconductor dice of the assembly connected to the at least partially exposed conductive through via ends; and
passivation on the surface of the base semiconductor die leaving the pads and conductive elements exposed.