Field effect resistor for ESD protection
View Patent ↗An electrostatic discharge protection device and methodology are provided for protecting semiconductor devices against electrostatic discharge events by temporarily forming during normal (non-ESD) operation two more inversion layers ( 112, 113 ) in a first well region ( 104 ) that is disposed between anode and cathode regions ( 105, 106 ) in response to one or more bias voltages (G 1, G 2 ) that are close to Vdd in order to reduce leakage current and capacitance during normal operation (non-ESD) condition. During an electrostatic discharge event, the bias voltages can be removed (e.g., decoupled or set to 0V) to eliminate the inversion layers, thereby forming a semiconductor resistor for shunting the ESD current.
1. A method for protecting an input of a semiconductor structure from an electrostatic discharge event, comprising:
providing a semiconductor substrate layer comprising a first well region that is disposed between and in series with anode and cathode regions and two or more field effect devices over the first well region;
forming two more inversion layers below the two or more field effect devices in the first well region in response to at least a first bias voltage; and
eliminating the two or more inversion layers in the event of an electrostatic discharge (ESD) event to thereby shunt ESD current between the anode and cathode regions and across the first well region.
2. The method of claim 1 , providing the semiconductor substrate comprises:
providing a P+ anode region disposed within a silicon layer formed over a buried oxide layer;
providing a first p-well device region within the silicon layer in series with the P+ anode region;
providing an P+ cathode region within the silicon layer in series with the first p-well device region; and
providing first and second field effect devices disposed at least substantially overlying the first p-well region.
3. The method of claim 1 , where forming two more inversion layers comprises electrically coupling at least the first bias voltage to the two or more field effect devices in the first well region.
4. The method of claim 1 , where eliminating the two or more inversion layers comprises decoupling at least the first bias voltage from the two or more field effect devices in the event of an ESD event.
5. The method of claim 1 , further comprising electrically coupling an RC-triggered sensing circuit to the two or more field effect devices to generate at least the first bias voltage for forming the two more inversion layers.
6. The method of claim 1 , further comprising electrically coupling the anode region to an input/output pad.
7. The method of claim 1 , further comprising electrically coupling the cathode region to a clamping circuit.