Integrated circuits that include deep trench capacitors and methods for their fabrication
Methods are provided for fabricating an integrated circuit that includes a deep trench capacitor. One method includes fabricating a plurality of transistors on a semiconductor substrate, the plurality of transistors each including gate structures, source and drain regions, and silicide contacts to the source and drain regions. A trench is then etched into the semiconductor substrate in proximity to the drain region of a selected transistor. The trench is filled with a layer of metal in contact with the semiconductor substrate, a layer of dielectric material overlying the layer of metal, and a second metal overlying the layer of dielectric material. A metal contact is then formed coupling the second metal to the silicide contact on the drain region of the selected transistor. A bit line is formed contacting the source region of the selected transistor and a word line is formed contacting the gate structure of the transistor.
1. A method for fabricating an integrated circuit comprising:
fabricating a plurality of transistors on a semiconductor substrate, the plurality of transistors each including gate structures, source and drain regions, and silicide contacts to the source and drain regions;
after fabricating the plurality of transistors including after forming the silicide contacts, depositing a layer of hard mask material overlying the transistors;
patterning the layer of hard mask material to form an opening through the layer of hard mask material in proximity to the drain region of a selected one of the transistors;
etching a trench into the semiconductor substrate through the metal silicide contacts to the drain regions using the patterned layer of hard mask material as an etch mask;
filling the trench with a layer of metal in contact with the semiconductor substrate, a layer of dielectric material overlying the layer of metal, and a second metal overlying the layer of dielectric material;
after filling the trench with the layer of metal, the layer of dielectric material, and the second metal, forming a metal contact coupling the second metal to the silicide contact on the drain region of the selected one of the transistors; and
forming a bit line contacting the source region of the selected one of the transistors and a word line contacting the gate structure of the selected one of the transistors.
2. The method of claim 1 wherein fabricating a plurality of transistors comprises fabricating a first plurality of transistors forming a logic circuit and a second plurality of transistors forming a memory circuit, and wherein the second plurality of transistors includes the selected one of the transistors.
3. The method of claim 1 wherein the semiconductor substrate comprises a semiconductor on insulator substrate having a semiconductor layer overlying an insulating layer overlying a high conductivity semiconductor substrate and wherein the step of etching comprises etching through the semiconductor layer and the insulating layer and into the high conductivity semiconductor substrate.
4. The method of claim 3 wherein filling the trench comprises:
depositing a layer of titanium nitride;
depositing a layer of high dielectric constant material overlying the titanium nitride;
depositing a second layer of titanium nitride overlying the layer of high dielectric constant material, and
depositing tungsten overlying the second layer of titanium nitride.
5. The method of claim 4 further comprising:
after depositing the layer of titanium nitride, filling the trench with a sacrificial material;
etching the sacrificial material back to a height substantially equal to the level of the insulating layer;
etching the layer of titanium nitride using the sacrificial material as an etch mask; and
removing the sacrificial material.
6. The method of claim 3 wherein etching a trench further comprises etching with a semiconductor etchant to increase the trench width in the high conductivity semiconductor substrate.
7. The method of claim 1 further comprising, after filling the trench:
depositing a layer of oxide;
etching contact openings through the layer of oxide, one of the contact openings exposing a portion of the second metal and a portion of the silicide contact on the drain region of the selected one of the transistors and a second one of the openings exposing a portion of the silicide contact on the source region of the selected one of the transistors;
filling the contact openings with conductive metal plugs, the metal plug in the one contact opening coupling the second metal to the silicide contact on the drain region and the conductive metal plug in the second opening contacting the silicide contact overlying the source region; and
depositing a layer of diffusion barrier material overlying the conductive metal plug.
8. The method of claim 7 further comprising:
depositing a layer of oxide overlying the layer of diffusion barrier material;
etching a contact opening through the layer of oxide and the layer of diffusion barrier material overlying the source region of the selected one of the transistors, the contact opening exposing the conductive metal plug overlying the silicide contact overlying the source region;
filling the contact opening with a conductive material; and
forming the bit line contacting the conductive material.
9. A method for fabricating an integrated circuit comprising:
fabricating a plurality of transistors on a semiconductor substrate, the plurality of transistors each including gate structures, source and drain regions, and silicide contacts to the source and drain regions;
after fabricating the plurality of transistors including after forming the silicide contacts, depositing a layer of hard mask material overlying the transistors;
patterning the layer of hard mask material to form an opening through the layer of hard mask material in proximity to the drain region of a selected one of the transistors;
etching a trench into the semiconductor substrate using the patterned layer of hard mask material as an etch mask;
filling the trench with a layer of metal in contact with the semiconductor substrate, a layer of dielectric material overlying the layer of metal, and a second metal overlying the layer of dielectric material;
after filling the trench with the layer of metal, the layer of dielectric material, and the second metal, depositing a layer of oxide overlying the transistors and the second metal in the trench;
etching contact openings through the layer of oxide, one of the contact openings exposing a portion of the second metal and a portion of the silicide contact on the drain region of the selected one of the transistors and a second one of the openings exposing a portion of the silicide contact on the source region of the selected one of the transistors;
filling the contact openings with conductive metal plugs, the metal plug in the one contact opening coupling the second metal to the silicide contact on the drain region and the conductive metal plug in the second opening contacting the silicide contact overlying the source region;
depositing a layer of diffusion barrier material overlying the conductive metal plugs after forming the metal plugs;
forming a bit line contacting the source region of the selected one of the transistors and a word line contacting the gate structure of the selected one of the transistors.