Process for realizing a connecting structure
View Patent ↗The present invention relates to a process for realizing a connecting structure in a semiconductor substrate, and the semiconductor substrate realized accordingly. The semiconductor substrate has at least a first surface, and is foreseen for a 3D integration with a second substrate along the first surface, wherein the 3D integration is subject to a lateral misalignment in at least one dimension having a misalignment value. This process includes growing a diffusion barrier structure for preventing diffusion of elements out of a conductive layer into the rest of the semiconductor substrate, wherein a first end surface, being the most outward surface of the diffusion barrier structure and being substantially parallel to the first surface, along a direction perpendicular to the first surface and going from the substrate toward the first surface, of the diffusion barrier structure can have a length, in the direction of the lateral misalignment, the length being dependent on the misalignment value, wherein the length of the diffusion barrier structure is chosen such that in a 3D integrated structure a diffusion of elements out of a conductive layer of the second substrate is prevented in the integrated state.
1. A semiconductor system, comprising:
a first substrate and a second substrate, with both substrates including a connecting structure, wherein each of the first and second substrates has at least a first surface, and is 3D integrated with the other substrate along the first surface, wherein the 3D integration is misaligned and has a lateral misalignment in at least one dimension having a misalignment value in a direction of lateral misalignment parallel to the first surface of each of the first substrate and the second substrate; and
each connecting structure includes a diffusion barrier structure for preventing diffusion of elements out of a conductive layer of the substrate, with the diffusion barrier structure of the first substrate preventing diffusion of elements from a conductive layer of the second substrate into the first substrate and the diffusion barrier structure of the second substrate preventing diffusion of elements from a conductive layer of the first substrate into the second substrate, and with each diffusion barrier structure configured so that a first end surface of each diffusion barrier structure, which is the most outward surface of the diffusion barrier oriented substantially parallel to the first surface of that substrate, has a length in the direction of the lateral misalignment, with the length being at least 20 nm and greater than the misalignment value so as to prevent diffusion of elements out of a conductive layer of the other substrate, and wherein the surface of the diffusion barrier structure is flush with the surface of the connecting structure and the substrate in which it is embedded.
2. The semiconductor system according to claim 1 , wherein the diffusion barrier structure comprises a diffusion barrier layer, and wherein the length is greater than a layer thickness of the diffusion barrier layer.
3. The semiconductor system according to claim 1 , wherein the length is at least as long as a length of the conductive layer of the second substrate along the direction of the misalignment.
4. The semiconductor system according to claim 1 , wherein the connecting structure further includes at least a conductive layer so that the conductive layer is separated from the first substrate by at least the diffusion barrier structure.
5. The semiconductor system according to claim 1 , wherein the diffusion barrier structure comprises a diffusion barrier layer.
6. The semiconductor system according to claim 5 , wherein the diffusion barrier structure includes a second layer on the diffusion barrier layer wherein the second layer has a growing rate higher than a growing rate of the diffusion barrier layer.
7. The semiconductor system according to claim 1 , wherein the diffusion barrier layer is one of tantalum, tantalum nitride, or silicon nitride.
8. The semiconductor system according to claim 1 , wherein the connecting structure is defined by a hole in the substrate, the diffusion barrier structure being disposed in the hole on a sidewall and a bottom of the hole, and conductive material is disposed in the hole on the diffusion barrier structure, wherein the diffusion barrier structure has a thickness on the sidewall of the hole that is equal to or greater than the misalignment value.
9. The semiconductor system according to claim 1 , wherein the length of the first end surface of each diffusion barrier structure is between 20 nm and 1 μm.
10. The semiconductor system according to claim 1 , wherein the diffusion barrier structure comprises at least one of tantalum, tantalum nitride, or silicon nitride.
11. A process for fabricating a connecting structure in a semiconductor substrate, the process comprising:
forming a first hole in a first surface of a first substrate;
forming a second hole in second surface of a second substrate;
growing a first diffusion barrier structure on the first substrate, the first diffusion barrier structure disposed at least partially within the first hole;
growing a second diffusion barrier structure on the second substrate, the second diffusion barrier structure disposed at least partially within the second hole;
providing a first conductive material in the first hole of the first substrate over the first diffusion barrier structure, the first diffusion barrier structure and the first conductive material defining a first connecting structure of the first substrate;
providing a second conductive material in the second hole of the second substrate over the second diffusion barrier structure, the second diffusion barrier structure and the second conductive material defining a second connecting structure of the second substrate;
3D integrating the first substrate and the second substrate and bonding the first connecting structure to the second connecting structure along first surface of the first substrate and the second surface of the second substrate, wherein the 3D integration is misaligned and has a lateral misalignment in at least one dimension having a misalignment value in a direction of lateral misalignment parallel to the first surface of the first substrate and the second surface of the second substrate;
prior to 3D integrating the first substrate and the second substrate, forming the first diffusion barrier structure to have a first end surface flush with a surface of the first conductive material and the first surface of the first substrate and oriented substantially parallel to the first surface of the first substrate, the first end surface located adjacent the second surface of the second substrate, the first end surface having a first length in the direction of the lateral misalignment, the first length being at least 20 nm and greater than the misalignment value so as to prevent diffusion of elements from the second conductive material of the second substrate into the first substrate; and
prior to 3D integrating the first substrate and the second substrate, forming the second diffusion barrier structure to have a second end surface flush with a surface of the second conductive material and the second surface of the second substrate and oriented substantially parallel to the second surface of the second substrate, the second end surface located adjacent the first surface of the first substrate, the second end surface having a second length in the direction of the lateral misalignment, the second length being at least 20 nm and greater than the misalignment value so as to prevent diffusion of elements from the first conductive material of the first substrate into the second substrate.
12. The process according to claim 11 , which further comprises separating the first conductive material from the first substrate by at least the first diffusion barrier structure.
13. The process according to claim 11 , further comprising providing the first conductive material in the first hole of the first substrate before forming at least a portion of the first diffusion barrier structure.
14. The process according to claim 11 , wherein growing a first diffusion barrier structure on the first substrate comprises growing a diffusion barrier layer at a first growth rate and then growing a second layer on the diffusion barrier layer at a second growth rate higher than the first growth rate.
15. The process according to claim 11 , further comprising forming the first diffusion barrier structure to comprise a first diffusion barrier layer having an average layer thickness equal to or greater than the misalignment value.