IP Library › Granted Patent US 9,036,869
Granted Patent B2
US 9,036,869 · App. 13/220,595 · Granted May 19, 2015

Multi-surface optical 3D microscope

Inventors: Ken Kinsun Lee (Los Altos Hills, CA); Ronny Soetarman (Fremont, CA); Zhen Hou (Fremont, CA); James Jianguo Xu (San Jose, CA); Rusmin Kudinar (Fremont, CA); Vamsi Mohan Velidandla (San Jose, CA); Ben Garland (Fremont, CA)
Assignee: Zeta Instruments, Inc.
G02B21/0016G02B21/367
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Quick Facts
Patent No.
US 9,036,869
App. No.
13/220,595
Granted
May 19, 2015
Kind
B2
Abstract

A method of detecting multi-surfaces of an object includes providing an imaging system capable of detecting surfaces of the object. After system parameters are set up, two-dimensional images of the object at multiple Z steps can be acquired. Each surface of the object can then be extracted using two steps. In a first step, the surface can be constructed based on a confidence threshold. In a second step, the surface can be enhanced using an interpolation filter.

Claims (40)

1. A method of detecting multiple surfaces of an object, the method comprising:

setting up system parameters of an imaging system;

acquiring two-dimensional images of each of the multiple surfaces of the object at multiple Z steps as defined by the system parameters; and

extracting each of the multiple surfaces of the object from the two-dimensional images, wherein each of the multiple surfaces includes a corresponding plurality of data points, each having a corresponding measure of confidence;

determining a corresponding confidence threshold for each of the multiple surfaces; and

enhancing each of the multiple surfaces using an interpolation filter to modify data points having a measure of confidence less than the corresponding confidence threshold.

2. The method of claim 1 , wherein the system parameters include: a number of surfaces included in the multiple surfaces, a Z scan step size, a percentile threshold, a start Z scan position, and a Z range of each of the multiple surfaces.

3. The method of claim 1 , wherein the imaging system is one of a structured light source based imaging system and a confocal imaging system.

4. The method of claim 1 , wherein the confidence threshold and the interpolation filter are based on one of image contrast values and image intensity values.

5. The method of claim 1 , wherein each measure of confidence comprises a contrast value.

6. The method of claim 1 , wherein each measure of confidence comprises an intensity value.

7. The method of claim 1 , wherein each measure of confidence is determined from the two-dimensional images.

8. The method of claim 1 , wherein the interpolation filter:

identifies a first data point having a measure of confidence less than the confidence threshold; and

identifies a first set of one or more data points in a neighborhood surrounding the first data point, wherein the first set of one or more data points includes each data point in the neighborhood having a measure of confidence greater than or equal to the confidence threshold.

9. The method of claim 8 , wherein the interpolation filter modifies the first data point based on a weighted average determined from the first set of one or more data points.

10. The method of claim 9 , wherein the interpolation filter raises the measure of confidence of the first data point.

11. The method of claim 8 , wherein the system parameters define a size of the neighborhood.

12. The method of claim 8 , wherein each of the data points has a corresponding Z profile value, wherein the interpolation filter calculates a weighted average of the Z profile values of the first set of one or more data points.

13. The method of claim 8 , wherein the measure of confidence comprises a contrast value, wherein the interpolation filter calculates a weighted average of the contrast values of the first set of one or more data points.

14. The method of claim 8 , wherein the measure of confidence comprises an intensity value, wherein the interpolation filter calculates a weighted average of the intensity values of the first set of one or more data points.

15. The method of claim 1 , further comprising determining the confidence threshold for each surface based on the measures of confidence of the data points of the surface.

16. A method of detecting multi-surfaces of an object, the method comprising:

providing an imaging system capable of detecting surfaces of the object;

setting up system parameters prior to image acquisition;

acquiring two-dimensional images at multiple Z steps as defined by the system parameters; and

extracting each surface of the object in two steps:

first, constructing the surface based on a confidence threshold; and

second, enhancing the surface using an interpolation filter,

wherein the confidence threshold and the interpolation filter are based on one of image contrast values and image intensity values, and

wherein the interpolation filter is determined by a filter length and one of an image contrast percentile threshold and an image intensity percentile threshold.

17. A method of detecting multi-surfaces of an object, the method comprising:

providing an imaging system capable of detecting surfaces of the object;

setting up system parameters prior to image acquisition;

acquiring two-dimensional images at multiple Z steps as defined by the system parameters; and

extracting each surface of the object in two steps:

first, constructing the surface based on a confidence threshold; and

second, enhancing the surface using an interpolation filter, wherein an enhanced surface includes first data points below the confidence threshold and second data points above the confidence threshold, the second data points neighboring the first data points.

18. The method of claim 17 , wherein the first data points are each assigned a new contrast and a new Z profile value derived from a contrast-weighted average of the second data points.

19. The method of claim 17 , wherein the first data points are each assigned a new contrast and a new Z profile value derived from an intensity-weighted average of the second data points.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 1, 2018
From: ZETA INSTRUMENTS, INC.
To: KLA-TENCOR CORPORATION
Reel/Frame 046530/0323 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 29, 2011
From: LEE, KEN KINSUN; SOETARMAN, RONNY; HOU, ZHEN; XU, JAMES JIANGUO; KUDINAR, RUSMIN; VELIDANDLA, VAMSI MOHAN; GARLAND, BEN
To: ZETA INSTRUMENTS, INC.
Reel/Frame 026824/0542 →
Continuity (2)
Provisional Application 61378794 · Aug 31, 2010
Related Publication 20120051660A1 · Mar 1, 2012