Back side alignment structure and manufacturing method for three-dimensional semiconductor device packages
View Patent ↗A mechanism for accurate alignment of semiconductor package back side interconnect processing is provided. As semiconductor die are placed in position for an encapsulated panel, two or more alignment die having fiducial markings formed on the back, or non-active, side of those die are also placed in the panel. Once all the die and other components have been placed for the panel, the panel is encapsulated using an encapsulant. Excess encapsulant, if any, is removed by a process such as backgrinding. The back grinding process exposes the back side of the alignment die and the fiducial features on those alignment die. The fiducial features on the alignment die can then be used for alignment of backside processing operations on the panel.
1. A method for packaging integrated circuit die, the method comprising:
forming a panel comprising
one or more integrated circuit die,
a plurality of alignment die, wherein
the alignment die comprise fiducial markings on a major surface of the alignment die, and
the panel has first and second major surfaces;
encapsulating the one or more integrated circuit die in the panel with an active surface of each integrated circuit die being exposed at the first major surface of the panel; and
encapsulating the plurality of alignment die in the panel with the major surface of the alignment die being exposed at the second major surface of the panel, wherein
the fiducial markings are exposed at the second major surface of the panel, and
said encapsulating the integrated circuit die and the plurality of alignment die is performed using an encapsulant.
2. The method of claim 1 further comprising:
exposing the major surface of the alignment die, wherein said exposing results in the alignment die fiducials filled with encapsulant.
3. The method of claim 2 wherein
said exposing comprises performing a backgrind of the second major surface of the panel; and
the backgrind is performed to a depth sufficient to expose the major surface of the alignment die and less than a depth of the fiducial markings on the major surface of the alignment die.
4. The method of claim 2 wherein the major surface of the alignment die comprises a material having high contrast with the encapsulant filling the fiducials.
5. The method of claim 4 wherein the major surface material of the alignment die comprises one of silicon, metal, and a dielectric.
6. The method of claim 1 further comprising:
exposing the major surface of the alignment die, wherein
said exposing comprises performing said encapsulating the plurality of alignment die such that an encapsulation thickness is the alignment die thickness.
7. The method of claim 6 further comprising:
forming the fiducial markings using one of laser drilling, engraving, or molding.
8. The method of claim 6 further comprising:
pre-filling the fiducial markings with a material that provides a high contrast with the major surface of the alignment die.
9. The method of claim 1 wherein said forming the panel further comprises:
placing the plurality of alignment die in a plurality of corresponding areas for the panel; and
forming the fiducial markings on the major surface of each of the alignment die subsequent to said placing.
10. The method of claim 9 wherein said forming comprises using a laser drill.
11. The method of Clam 9 wherein said forming provides fiducial markings having an aspect ratio of a width of the fiducial markings to a depth of the fiducial markings of less than one.
12. The method of claim 1 wherein said forming the panel further comprises:
placing the plurality of alignment die in a plurality of corresponding areas for the panel, wherein the fiducial markings are provided on the alignment die prior to said placing.
13. The method of claim 12 wherein the alignment die are molded with the fiducial markings.
14. The method of claim 1 wherein the plurality of alignment die have a thickness between the major surface of the alignment die and the first major surface of the panel that is greater than a thickness of the plurality of integrated circuit die.
15. The method of claim 2 wherein, prior to said exposing the major surface of the plurality of alignment die, the plurality of alignment die have a thickness between the major surface of the alignment die and the first major surface of the panel that is greater than a thickness of the panel between the first and second major surfaces of the panel subsequent to said exposing.
16. The method of claim 1 wherein the plurality of alignment die comprises two alignment die.
17. The method of claim 1 further comprising:
filling the alignment die fiducials with a material having an optical contrast with a material comprising the major surface of the alignment die, wherein said filling is performed prior to said encapsulating the plurality of alignment die in the panel.
18. The method of claim 1 wherein the alignment die are one of active die having an active surface opposing the major surface of the alignment die, or dummy die having no active surface opposing the major surface of the alignment die.
19. The method of claim 1 further comprising:
forming a dielectric layer over the second major surface of the panel;
forming a plurality of holes in the dielectric layer to expose conductive structures accessible on the second major surface of the panel, wherein said forming the plurality of holes is performed using the alignment die fiducial markings for alignment of the holes; and
forming one or more electrical interconnects over the second major surface of the panel, using the plurality of holes.
20. A method for packaging integrated circuit die, the method comprising:
forming a panel comprising
a plurality of alignment die, wherein
the alignment die comprise alignment markings on a major surface of the alignment die, and
the panel has first and second major surfaces;
forming the alignment markings on the alignment die by one of drilling, laser drilling, molding, or printing; and
encapsulating the plurality of alignment die in the panel with the major surface of the alignment die being exposed at the second major surface of the panel, wherein
the fiducial markings are exposed at the second major surface of the panel, and
the fiducial markings contrast with the major surface of the alignment die subsequent to being exposed.