IP Library Granted Patent US 9,142,502
Granted Patent B2
US 9,142,502 · App. 13/222,143 · Granted Sep 22, 2015

Semiconductor device packaging having pre-encapsulation through via formation using drop-in signal conduits

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Quick Facts
Patent No.
US 9,142,502
App. No.
13/222,143
Granted
Sep 22, 2015
Kind
B2
Abstract

A semiconductor device package having pre-formed and placed through vias and a process for making such a package is provided. One or more signal conduits are placed in a holder that is subsequently embedded in an encapsulated semiconductor device package. The ends of the signal conduits are exposed and the signal conduits are then used as through package vias, providing signal-bearing pathways between interconnects or contacts on the bottom and top of the package. Holders can be provided in a variety of geometries and materials, depending upon the nature of the application. Further, multiple holders with signal conduits can be provided in a single package to provide for more complex interconnect configuration demands in, for example, system-in-a-package applications.

Claims (53)

1. A method for packaging an electronic device assembly, the method comprising:

providing a conduit assembly comprising a holder and one or more signal conduits attached to the holder, wherein

the holder comprises a moldable, non-conductive material, and

the moldable, non-conductive material is one of a substrate core or a ceramic;

placing the conduit assembly in a first area of a carrier for the electronic device assembly, wherein the carrier is distinct from the holder;

placing a first electronic device in a second area of the carrier for the electronic device assembly;

forming an encapsulant over and around sides of the first electronic device and over and around sides of the conduit assembly; and

exposing a first end of a signal conduit of the one or more signal conduits and a second end of the signal conduit, wherein

the signal conduit forms a via through the encapsulated electronic device assembly, and

the signal conduit couples an interconnect formed on a first major surface of the encapsulated electronic device assembly with an interconnect formed on a second major surface of the encapsulated electronic device assembly.

2. The method of claim 1 wherein said exposing further comprises removing a portion of the encapsulant from the electronic device assembly.

3. The method of claim 2 wherein said removing further comprises one of:

grinding the encapsulant from the electronic device assembly to a depth matching the end of the signal conduit; and

laser ablating the encapsulant from the electronic device assembly to a depth matching the end of the signal conduit.

4. The method of claim 1 wherein said exposing further comprises performing said forming the encapsulant exposes the ends of conduit without removing a portion of the encapsulant.

5. The method of claim 1 further comprising:

providing a double-sided adhesive tape disposed on the carrier, wherein

said placing the conduit assembly comprises placing the conduit assembly on the tape with an end of each signal conduit in contact with the tape, and

said exposing comprises removing the tape from the encapsulated electronic device assembly.

6. The method of claim 1 , wherein

the one or more signal conduits are embedded in the holder; and

the first and second ends of the signal conduit are exposed.

7. The method of claim 1 wherein the conduit assembly comprises a conductive routing on one or both sides of the holder or inside the holder, wherein the conductive routing is coupled to one or more of the signal conduits.

8. The method of claim 1 further comprising:

providing a second conduit assembly comprising a second holder and second signal conduits attached to the second holder;

placing the second conduit assembly in a third area for the electronic device assembly;

forming the encapsulant over and around sides of the second conduit assembly; and

exposing first end of a second signal conduit of the second signal conduits and a second end of the second signal conduit, wherein

the second signal conduit forms a second via through the encapsulated electronic device assembly.

9. The method of claim 8 further comprising:

placing a second electronic device in a fourth area for the electronic device assembly; and

forming the encapsulant over and around sides of the second electronic device.

10. The method of claim 1 further comprising:

providing a frame or substrate in the first area for the electronic device assembly, wherein

said placing the conduit assembly comprises placing the first end of the signal conduit on the frame or substrate; and

attaching the first end of the signal conduit to the frame or substrate using a conductive bond.

11. The method of claim 1 further comprising:

coupling one of the first and second end of the signal conduit to an electrical contact of the first electronic device, wherein said coupling is performed using one of wire bond, flip chip bumping or other techniques.

12. A method for packaging an electronic device, the method comprising:

providing one or more signal conduits, wherein each signal conduit has a length equal to a thickness of an encapsulated region of the package;

attaching the one or more signal conduits to a holder to form a conduit assembly, wherein

the holder comprises a moldable, non-conductive material, and

the moldable, non-conductive material is one of a substrate core or a ceramic;

placing the conduit assembly in a first area of a carrier for the electronic device package, wherein the carrier is distinct from the holder;

placing a first electronic device in a second area of the carrier for the electronic device package;

forming an encapsulant over and around sides of the first electronic device and over and around sides of the conduit assembly;

exposing a first end of a signal conduit of the one or more signal conduits and a second end of the signal conduit, wherein

the signal conduit forms a via through the encapsulated electronic device assembly;

forming a first interconnect structure on a first major surface of the electronic device package, wherein the first interconnect structure is coupled to the first end of the signal conduit; and

forming a second interconnect structure on a second major surface of the electronic device package, wherein the second interconnect structure is coupled to the second end of the signal conduit.

13. The method of claim 12 wherein said attaching the one or more signal conduits to the holder comprises one of

molding the holder material around the one or more signal conduits, and

pressing the one or more signal conduits into the holder material.

Assignments (22)
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040925 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Feb 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V. F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 052917/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 040928 FRAME 0001. ASSIGNOR(S) HEREBY CONFIRMS THE RELEASE OF SECURITY INTEREST. Recorded Jan 17, 2020
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 052915/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE APPLICATION 11759915 AND REPLACE IT WITH APPLICATION 11759935 PREVIOUSLY RECORDED ON REEL 037486 FRAME 0517. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Dec 10, 2019
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 053547/0421 →
RELEASE OF SECURITY INTEREST Recorded Sep 10, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 050744/0097 →
CORRECTIVE ASSIGNMENT TO CORRECT THE TO CORRECT THE APPLICATION NO. FROM 13,883,290 TO 13,833,290 PREVIOUSLY RECORDED ON REEL 041703 FRAME 0536. ASSIGNOR(S) HEREBY CONFIRMS THE THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS.. Recorded Feb 20, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: SHENZHEN XINGUODU TECHNOLOGY CO., LTD.
Reel/Frame 048734/0001 →
CORRECTIVE ASSIGNMENT TO CORRECT THE NATURE OF CONVEYANCE PREVIOUSLY RECORDED AT REEL: 040632 FRAME: 0001. ASSIGNOR(S) HEREBY CONFIRMS THE MERGER AND CHANGE OF NAME. Recorded Sep 21, 2017
From: FREESCALE SEMICONDUCTOR INC.
To: NXP USA, INC.
Reel/Frame 044209/0047 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE PATENTS 8108266 AND 8062324 AND REPLACE THEM WITH 6108266 AND 8060324 PREVIOUSLY RECORDED ON REEL 037518 FRAME 0292. ASSIGNOR(S) HEREBY CONFIRMS THE ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS. Recorded Feb 1, 2017
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 041703/0536 →
CHANGE OF NAME Recorded Nov 8, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: NXP USA, INC.
Reel/Frame 040632/0001 →
RELEASE OF SECURITY INTEREST Recorded Nov 7, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP B.V.
Reel/Frame 040928/0001 →
RELEASE OF SECURITY INTEREST Recorded Sep 21, 2016
From: MORGAN STANLEY SENIOR FUNDING, INC.
To: NXP, B.V., F/K/A FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 040925/0001 →
SUPPLEMENT TO THE SECURITY AGREEMENT Recorded Jun 16, 2016
From: FREESCALE SEMICONDUCTOR, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 039138/0001 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 13, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037518/0292 →
ASSIGNMENT AND ASSUMPTION OF SECURITY INTEREST IN PATENTS Recorded Jan 12, 2016
From: CITIBANK, N.A.
To: MORGAN STANLEY SENIOR FUNDING, INC.
Reel/Frame 037486/0517 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0285 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0334 →
PATENT RELEASE Recorded Dec 21, 2015
From: CITIBANK, N.A., AS COLLATERAL AGENT
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 037357/0387 →
SECURITY AGREEMENT Recorded Nov 6, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 031591/0266 →
SECURITY AGREEMENT Recorded Jun 18, 2013
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS NOTES COLLATERAL AGENT
Reel/Frame 030633/0424 →
SECURITY AGREEMENT Recorded Jan 31, 2012
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 027622/0477 →
SECURITY AGREEMENT Recorded Jan 31, 2012
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 027622/0075 →
SECURITY AGREEMENT Recorded Jan 31, 2012
From: FREESCALE SEMICONDUCTOR, INC.
To: CITIBANK, N.A., AS COLLATERAL AGENT
Reel/Frame 027621/0928 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 31, 2011
From: GONG, ZHIWEI; CHHABRA, NAVJOT; DAVES, GLENN G.; HAYES, SCOTT M.; MITCHELL, DOUGLAS G.; WRIGHT, JASON R.
To: FREESCALE SEMICONDUCTOR, INC.
Reel/Frame 026838/0322 →