CFA resist silylation for limiting color interactions and improving crosstalk
View Patent ↗An electronic imager includes a pixel sensor array, a plurality elements of a color filter array containing pigments forming multiple color filter patterns on the pixel sensor array and a silylating agent formed between at least first and second elements of the multiple color filter patterns. A method for forming a color filter array on a pixel sensor array of an electronic imager includes forming a pixel sensor array on a substrate, forming a first color filter pattern on the pixel sensor array, depositing a silylating agent on the first color filter pattern, disposing elements of a second color filter pattern on the silylating agent between respective elements of the first color filter pattern and disposing elements of a third color filter pattern on the silylating agent between respective elements of the first color filter pattern.
1. A color electronic imager comprising:
a pixel sensor array formed on a substrate;
a plurality of elements of a color filter array (CFA) containing pigments forming multiple color filter patterns on the pixel sensor array; and
a silylating agent formed between respective elements of at least first and second ones of the multiple color filter patterns.
2. The color electronic imager of claim 1 , wherein the multiple color filter patterns form a Bayer pattern.
3. The color electronic imager of claim 2 , wherein a first color filter pattern of the multiple color filter patterns includes a green pigment and the silylating agent is formed on the first color filter pattern of the multiple color filter patterns.
4. The color electronic imager of claim 3 , wherein a second color filter pattern of the multiple color filter patterns includes a red pigment formed on the silylating agent and a third color filter pattern of the multiple color filter patterns includes a blue pigment formed on the silylating agent.
5. The color electronic imager of claim 1 , wherein the silylating agent includes one or more compounds selected from the group consisting of Cl 3 SiCH 2 CH 2 SiCl 3 , SiR x (OR′) 4-x , SiR x (OR′) 4-x , Si 2 O(OR) 6 , SiCl y R 4-y , Si 2 OCl y R 4-y , Si 3 O 2 Cl y R 8-y , and hexamethylcyclotrisilazane C 6 H 21 N 3 Si 3 where R and R′ are each independently substituted or unsubstituted hydrocarbyl groups and x and y are each independently 0, 1, 2, 3, or 4.
6. The color electronic imager of claim 5 , wherein the substituted hydrocarbyl groups comprise one or more functional groups selected from the group consisting of halides, alkyl groups, halogenated alkyl groups, aryl groups, halogenated aryl groups, alkenyl groups, CN groups, RCN groups, OR groups, O 2 R—NH z R 2-z , additional Si(OR) x groups, organic groups having a (meth)acryloxy, acetoxy, mercapto, amino or cyano group, and acrylate groups, where x=1, 2, 3, or 4 and z=0, 1 or 2.
7. The color electronic imager of claim 5 , wherein the silylating agent is further hydrolyzed or oxidized, either during the deposition, or prior to the application of the silylating agent.
8. The color electronic imager of claim 1 , wherein the silylating agent formed between respective elements of the at least first and second ones of the multiple color filter patterns has a thickness in the range of 1 nanometer to 1000 nanometer.
9. The color electronic imager of claim 8 , wherein the silylating agent formed between respective elements of the at least first and second ones of the multiple color filter patterns has a thickness in the range of 5 nanometer to 20 nanometer.
10. The color electronic imager of claim 1 , wherein the color filter array includes pigmented photoresist material.
11. The color electronic imager of claim 4 , wherein the silylating agent is applied on top of the second and the third color filter patterns.
12. The color electronic imager of claim 1 , further comprising a microlens array disposed on the color filter array.
13. The color electronic imager of claim 12 , wherein the silylating agent is formed on the microlens array.